JPS55163862A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS55163862A JPS55163862A JP7170679A JP7170679A JPS55163862A JP S55163862 A JPS55163862 A JP S55163862A JP 7170679 A JP7170679 A JP 7170679A JP 7170679 A JP7170679 A JP 7170679A JP S55163862 A JPS55163862 A JP S55163862A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- insulating film
- opening
- film
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 229920002120 photoresistant polymer Polymers 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7170679A JPS55163862A (en) | 1979-06-07 | 1979-06-07 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7170679A JPS55163862A (en) | 1979-06-07 | 1979-06-07 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55163862A true JPS55163862A (en) | 1980-12-20 |
| JPS6119113B2 JPS6119113B2 (enrdf_load_stackoverflow) | 1986-05-15 |
Family
ID=13468244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7170679A Granted JPS55163862A (en) | 1979-06-07 | 1979-06-07 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55163862A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6383714U (enrdf_load_stackoverflow) * | 1986-11-20 | 1988-06-01 |
-
1979
- 1979-06-07 JP JP7170679A patent/JPS55163862A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6119113B2 (enrdf_load_stackoverflow) | 1986-05-15 |
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