JPS5515940A - Liquid phase epitaxial growing method - Google Patents
Liquid phase epitaxial growing methodInfo
- Publication number
- JPS5515940A JPS5515940A JP8680878A JP8680878A JPS5515940A JP S5515940 A JPS5515940 A JP S5515940A JP 8680878 A JP8680878 A JP 8680878A JP 8680878 A JP8680878 A JP 8680878A JP S5515940 A JPS5515940 A JP S5515940A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- soln
- growing method
- crystals
- lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To grow an epitaxial layer of a uniform thickness by a liuyid phase growing method by putting a lid covering the surface of a soln. and by forming the under surface of the lid into an inclined or curved surface canceling the thickness distribution of crystals on a substrate.
CONSTITUTION: Soln. 12 for growth is housed in the opening of slider 11 sliding on support stand 10 provided with a recess holding substrate 2. The upper surface of soln. 12 is covered with interlocking type lid 13 with a predetermined inclined or curved under surface canceling the thickness distribution of crystals on substrate 2. A cpd. semiconductor and mixed crystals thereof are grown on substrate 2.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8680878A JPS5515940A (en) | 1978-07-18 | 1978-07-18 | Liquid phase epitaxial growing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8680878A JPS5515940A (en) | 1978-07-18 | 1978-07-18 | Liquid phase epitaxial growing method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5515940A true JPS5515940A (en) | 1980-02-04 |
Family
ID=13897101
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8680878A Pending JPS5515940A (en) | 1978-07-18 | 1978-07-18 | Liquid phase epitaxial growing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5515940A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS589060U (en) * | 1981-07-08 | 1983-01-20 | 三菱電機株式会社 | Rotating electric machine end enclosure |
-
1978
- 1978-07-18 JP JP8680878A patent/JPS5515940A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS589060U (en) * | 1981-07-08 | 1983-01-20 | 三菱電機株式会社 | Rotating electric machine end enclosure |
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