JPS55156328A - Manufacture for integrated element - Google Patents
Manufacture for integrated elementInfo
- Publication number
- JPS55156328A JPS55156328A JP6425879A JP6425879A JPS55156328A JP S55156328 A JPS55156328 A JP S55156328A JP 6425879 A JP6425879 A JP 6425879A JP 6425879 A JP6425879 A JP 6425879A JP S55156328 A JPS55156328 A JP S55156328A
- Authority
- JP
- Japan
- Prior art keywords
- film
- mark
- pattern
- burr
- hollow portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000010894 electron beam technology Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000001514 detection method Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6425879A JPS55156328A (en) | 1979-05-24 | 1979-05-24 | Manufacture for integrated element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6425879A JPS55156328A (en) | 1979-05-24 | 1979-05-24 | Manufacture for integrated element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55156328A true JPS55156328A (en) | 1980-12-05 |
| JPS6210010B2 JPS6210010B2 (enrdf_load_stackoverflow) | 1987-03-04 |
Family
ID=13252974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6425879A Granted JPS55156328A (en) | 1979-05-24 | 1979-05-24 | Manufacture for integrated element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55156328A (enrdf_load_stackoverflow) |
-
1979
- 1979-05-24 JP JP6425879A patent/JPS55156328A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6210010B2 (enrdf_load_stackoverflow) | 1987-03-04 |
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