JPS55154571A - Vacuum vapor deposition apparatus - Google Patents

Vacuum vapor deposition apparatus

Info

Publication number
JPS55154571A
JPS55154571A JP6206979A JP6206979A JPS55154571A JP S55154571 A JPS55154571 A JP S55154571A JP 6206979 A JP6206979 A JP 6206979A JP 6206979 A JP6206979 A JP 6206979A JP S55154571 A JPS55154571 A JP S55154571A
Authority
JP
Japan
Prior art keywords
room
door
vapor deposition
opening
clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6206979A
Other languages
English (en)
Japanese (ja)
Other versions
JPS628510B2 (enExample
Inventor
Sueo Tsumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP6206979A priority Critical patent/JPS55154571A/ja
Publication of JPS55154571A publication Critical patent/JPS55154571A/ja
Publication of JPS628510B2 publication Critical patent/JPS628510B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP6206979A 1979-05-19 1979-05-19 Vacuum vapor deposition apparatus Granted JPS55154571A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6206979A JPS55154571A (en) 1979-05-19 1979-05-19 Vacuum vapor deposition apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6206979A JPS55154571A (en) 1979-05-19 1979-05-19 Vacuum vapor deposition apparatus

Publications (2)

Publication Number Publication Date
JPS55154571A true JPS55154571A (en) 1980-12-02
JPS628510B2 JPS628510B2 (enExample) 1987-02-23

Family

ID=13189428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6206979A Granted JPS55154571A (en) 1979-05-19 1979-05-19 Vacuum vapor deposition apparatus

Country Status (1)

Country Link
JP (1) JPS55154571A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01161262U (enExample) * 1989-03-23 1989-11-09

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5421564U (enExample) * 1977-07-14 1979-02-13

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5421564U (enExample) * 1977-07-14 1979-02-13

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01161262U (enExample) * 1989-03-23 1989-11-09

Also Published As

Publication number Publication date
JPS628510B2 (enExample) 1987-02-23

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