JPS6425974A - Sputtering device - Google Patents
Sputtering deviceInfo
- Publication number
- JPS6425974A JPS6425974A JP17975487A JP17975487A JPS6425974A JP S6425974 A JPS6425974 A JP S6425974A JP 17975487 A JP17975487 A JP 17975487A JP 17975487 A JP17975487 A JP 17975487A JP S6425974 A JPS6425974 A JP S6425974A
- Authority
- JP
- Japan
- Prior art keywords
- door
- chamber
- sputtering
- shut
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To facilitate maintenance and inspection of a sputtering source by fitting the source to the inside of a door so fitted to a sputtering chamber that it is freely opened and shut. CONSTITUTION:A door 4 is so fitted to a sputtering chamber 1 that it is freely opened and shut. When the door 4 is shut, the inlet 5 of the chamber 1 for carrying a body on which a film is formed, e.g., a substrate 7 into the chamber 1 is airtightly blocked through packing 6. A sputtering source 2 is fitted to the inside of the door 4 so that it is moved together with the door 4. The door 4 is opened and the substrate 7 is carried into the chamber 1 and set at a prescribed position. The door 4 is then shut and sputtering is carried out. In the case where maintenance and inspection of the sputtering source 2 are required, the door 4 is opened and necessary maintenance and inspection of the source 2 taken out of the chamber 1 together with the door 4 are very easily carried out.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17975487A JPS6425974A (en) | 1987-07-17 | 1987-07-17 | Sputtering device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17975487A JPS6425974A (en) | 1987-07-17 | 1987-07-17 | Sputtering device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6425974A true JPS6425974A (en) | 1989-01-27 |
Family
ID=16071296
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17975487A Pending JPS6425974A (en) | 1987-07-17 | 1987-07-17 | Sputtering device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6425974A (en) |
-
1987
- 1987-07-17 JP JP17975487A patent/JPS6425974A/en active Pending
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