JPS6425974A - Sputtering device - Google Patents

Sputtering device

Info

Publication number
JPS6425974A
JPS6425974A JP17975487A JP17975487A JPS6425974A JP S6425974 A JPS6425974 A JP S6425974A JP 17975487 A JP17975487 A JP 17975487A JP 17975487 A JP17975487 A JP 17975487A JP S6425974 A JPS6425974 A JP S6425974A
Authority
JP
Japan
Prior art keywords
door
chamber
sputtering
shut
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17975487A
Other languages
Japanese (ja)
Inventor
Noboru Yamahara
Hajime Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP17975487A priority Critical patent/JPS6425974A/en
Publication of JPS6425974A publication Critical patent/JPS6425974A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To facilitate maintenance and inspection of a sputtering source by fitting the source to the inside of a door so fitted to a sputtering chamber that it is freely opened and shut. CONSTITUTION:A door 4 is so fitted to a sputtering chamber 1 that it is freely opened and shut. When the door 4 is shut, the inlet 5 of the chamber 1 for carrying a body on which a film is formed, e.g., a substrate 7 into the chamber 1 is airtightly blocked through packing 6. A sputtering source 2 is fitted to the inside of the door 4 so that it is moved together with the door 4. The door 4 is opened and the substrate 7 is carried into the chamber 1 and set at a prescribed position. The door 4 is then shut and sputtering is carried out. In the case where maintenance and inspection of the sputtering source 2 are required, the door 4 is opened and necessary maintenance and inspection of the source 2 taken out of the chamber 1 together with the door 4 are very easily carried out.
JP17975487A 1987-07-17 1987-07-17 Sputtering device Pending JPS6425974A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17975487A JPS6425974A (en) 1987-07-17 1987-07-17 Sputtering device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17975487A JPS6425974A (en) 1987-07-17 1987-07-17 Sputtering device

Publications (1)

Publication Number Publication Date
JPS6425974A true JPS6425974A (en) 1989-01-27

Family

ID=16071296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17975487A Pending JPS6425974A (en) 1987-07-17 1987-07-17 Sputtering device

Country Status (1)

Country Link
JP (1) JPS6425974A (en)

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