JPH01161262U - - Google Patents

Info

Publication number
JPH01161262U
JPH01161262U JP3247489U JP3247489U JPH01161262U JP H01161262 U JPH01161262 U JP H01161262U JP 3247489 U JP3247489 U JP 3247489U JP 3247489 U JP3247489 U JP 3247489U JP H01161262 U JPH01161262 U JP H01161262U
Authority
JP
Japan
Prior art keywords
tray
chamber
continuous discharge
reaction treatment
discharge reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3247489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3247489U priority Critical patent/JPH01161262U/ja
Publication of JPH01161262U publication Critical patent/JPH01161262U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP3247489U 1989-03-23 1989-03-23 Pending JPH01161262U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3247489U JPH01161262U (enExample) 1989-03-23 1989-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3247489U JPH01161262U (enExample) 1989-03-23 1989-03-23

Publications (1)

Publication Number Publication Date
JPH01161262U true JPH01161262U (enExample) 1989-11-09

Family

ID=31258983

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3247489U Pending JPH01161262U (enExample) 1989-03-23 1989-03-23

Country Status (1)

Country Link
JP (1) JPH01161262U (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55154571A (en) * 1979-05-19 1980-12-02 Nec Corp Vacuum vapor deposition apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55154571A (en) * 1979-05-19 1980-12-02 Nec Corp Vacuum vapor deposition apparatus

Similar Documents

Publication Publication Date Title
WO2002101799A3 (en) Stackable process chambers
HK35395A (en) Clean transfer method and system therefor
JPH0841643A (ja) プレート状の工作部材を処理するための真空装置用の処理ユニット及び該処理ユニットの製造方法
JPS6257378B2 (enExample)
USD274393S (en) Shower caddy
WO2003009343A3 (en) Plating apparatus
JPH01161262U (enExample)
JPS6467592A (en) Heat exchanger
JPS63164929U (enExample)
JPH01114096U (enExample)
JPS57136320A (en) Exchanger for sample in electron-ray drawing device
JPH02131257U (enExample)
JPS63122606U (enExample)
JPS628633U (enExample)
JPH0363573U (enExample)
EP0255965A3 (en) Refrigerant fluid trap for vacuum evaporators for the deposit of thin metal films
JPS58142387U (ja) ギヤ−ポンプ
JPS61178186U (enExample)
JPS641385U (enExample)
JPS63129149U (enExample)
JPS6357447U (enExample)
JPS6388180U (enExample)
JPS6384866U (enExample)
JPS5735681A (en) Vacuum device
JPS5859564U (ja) シヨツトブラスト装置