JPS55153334A - Manufacture of integrated element - Google Patents

Manufacture of integrated element

Info

Publication number
JPS55153334A
JPS55153334A JP6199179A JP6199179A JPS55153334A JP S55153334 A JPS55153334 A JP S55153334A JP 6199179 A JP6199179 A JP 6199179A JP 6199179 A JP6199179 A JP 6199179A JP S55153334 A JPS55153334 A JP S55153334A
Authority
JP
Japan
Prior art keywords
mark
reference mark
flash
electron beam
setting reference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6199179A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6210009B2 (enExample
Inventor
Masaki Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP6199179A priority Critical patent/JPS55153334A/ja
Publication of JPS55153334A publication Critical patent/JPS55153334A/ja
Publication of JPS6210009B2 publication Critical patent/JPS6210009B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Electron Beam Exposure (AREA)
JP6199179A 1979-05-18 1979-05-18 Manufacture of integrated element Granted JPS55153334A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6199179A JPS55153334A (en) 1979-05-18 1979-05-18 Manufacture of integrated element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6199179A JPS55153334A (en) 1979-05-18 1979-05-18 Manufacture of integrated element

Publications (2)

Publication Number Publication Date
JPS55153334A true JPS55153334A (en) 1980-11-29
JPS6210009B2 JPS6210009B2 (enExample) 1987-03-04

Family

ID=13187163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6199179A Granted JPS55153334A (en) 1979-05-18 1979-05-18 Manufacture of integrated element

Country Status (1)

Country Link
JP (1) JPS55153334A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0261407U (enExample) * 1988-10-24 1990-05-08
JPH0670813U (ja) * 1993-03-16 1994-10-04 鐘紡株式会社 フィルターハウジング

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5456814A (en) * 1977-10-14 1979-05-08 Nippon Gakki Seizo Kk Electronic musical instrument

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5456814A (en) * 1977-10-14 1979-05-08 Nippon Gakki Seizo Kk Electronic musical instrument

Also Published As

Publication number Publication date
JPS6210009B2 (enExample) 1987-03-04

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