JPS54144177A - Manufacturing mask for semiconductor device - Google Patents
Manufacturing mask for semiconductor deviceInfo
- Publication number
- JPS54144177A JPS54144177A JP5237578A JP5237578A JPS54144177A JP S54144177 A JPS54144177 A JP S54144177A JP 5237578 A JP5237578 A JP 5237578A JP 5237578 A JP5237578 A JP 5237578A JP S54144177 A JPS54144177 A JP S54144177A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- alignment
- mask
- mask plate
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To make easy for alignment, by providing the steps toward two directions at one surface of the mask plate.
CONSTITUTION: The alignment OF3b is made with an angle θ to the orientation flat OF3a of the substrate 3. The step 4b matching with the OF3a,3b is provided with the major plane 4a of the glass mask plate 4, and the step thickness t2 is taken as t1≥2t2, where; t1 is the thickness of the substrate 3, and when the mask plate 4 is mounted on the both sides of the substrate 3, they are adhered. Further, on the glass mask, opaque pattern is drawn at the specified position. With this constitution, mask alignment can be easier and the accuracy is not different from conventional devices.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5237578A JPS54144177A (en) | 1978-05-02 | 1978-05-02 | Manufacturing mask for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5237578A JPS54144177A (en) | 1978-05-02 | 1978-05-02 | Manufacturing mask for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54144177A true JPS54144177A (en) | 1979-11-10 |
Family
ID=12913049
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5237578A Pending JPS54144177A (en) | 1978-05-02 | 1978-05-02 | Manufacturing mask for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54144177A (en) |
-
1978
- 1978-05-02 JP JP5237578A patent/JPS54144177A/en active Pending
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