JPS55145355A - Semiconductor device and fabrication of the same - Google Patents

Semiconductor device and fabrication of the same

Info

Publication number
JPS55145355A
JPS55145355A JP5251179A JP5251179A JPS55145355A JP S55145355 A JPS55145355 A JP S55145355A JP 5251179 A JP5251179 A JP 5251179A JP 5251179 A JP5251179 A JP 5251179A JP S55145355 A JPS55145355 A JP S55145355A
Authority
JP
Japan
Prior art keywords
film
wiring conductor
openings
layer
conductor layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5251179A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6136706B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Fusaji Shoji
Kazunari Takemoto
Ryoichi Sudo
Takeshi Watanabe
Ataru Yokono
Tokio Isogai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5251179A priority Critical patent/JPS55145355A/ja
Publication of JPS55145355A publication Critical patent/JPS55145355A/ja
Publication of JPS6136706B2 publication Critical patent/JPS6136706B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP5251179A 1979-05-01 1979-05-01 Semiconductor device and fabrication of the same Granted JPS55145355A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5251179A JPS55145355A (en) 1979-05-01 1979-05-01 Semiconductor device and fabrication of the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5251179A JPS55145355A (en) 1979-05-01 1979-05-01 Semiconductor device and fabrication of the same

Publications (2)

Publication Number Publication Date
JPS55145355A true JPS55145355A (en) 1980-11-12
JPS6136706B2 JPS6136706B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-08-20

Family

ID=12916752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5251179A Granted JPS55145355A (en) 1979-05-01 1979-05-01 Semiconductor device and fabrication of the same

Country Status (1)

Country Link
JP (1) JPS55145355A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57111030A (en) * 1980-12-27 1982-07-10 Fujitsu Ltd Passivation film
CN114063389A (zh) * 2020-07-31 2022-02-18 华为技术有限公司 图案化材料和图案化薄膜

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57111030A (en) * 1980-12-27 1982-07-10 Fujitsu Ltd Passivation film
CN114063389A (zh) * 2020-07-31 2022-02-18 华为技术有限公司 图案化材料和图案化薄膜
JP2023537322A (ja) * 2020-07-31 2023-08-31 華為技術有限公司 パターニング材料およびパターン化膜

Also Published As

Publication number Publication date
JPS6136706B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-08-20

Similar Documents

Publication Publication Date Title
JPS5477081A (en) Semiconductor device and production of the same
JPS5365088A (en) Semiconductor device
JPS55145355A (en) Semiconductor device and fabrication of the same
JPS55158649A (en) Manufacture of electrode wiring
JPS5378789A (en) Manufacture of semiconductor integrated circuit
JPS5567158A (en) Inductor device of hybrid integrated circuit
JPS5748249A (en) Semiconductor device
JPS5261980A (en) Production of semiconductor device
JPS5397789A (en) Semiconductor device
JPS5224084A (en) Semiconductor manufacturing rpocess
JPS5636153A (en) Semiconductor integrated circuit
JPS56126943A (en) Production of semiconductor device
JPS5651015A (en) Integrated head
JPS56110267A (en) Semiconductor device
JPS5612764A (en) Manufacturing method for semiconductor device
JPS5617041A (en) Manufacture of semiconductor device
JPS5735345A (en) Multilayer wiring structure and manufacturing method of the same
JPS5552252A (en) Semiconductor integrated circuit device and manufacturing of them
JPS52156584A (en) Multilayer wiring type semiconductor device
JPS5329088A (en) Production of semiconductor integrated circuit device
JPS5318962A (en) Semiconductor package
JPS568825A (en) Semiconductor device
JPS5349964A (en) Manufacture of semiconductor device
JPS5320875A (en) Semiconductor integrated circuit device
JPS5317286A (en) Production of semiconductor device