JPS55138874A - Semiconductor device and method of fabricating the same - Google Patents
Semiconductor device and method of fabricating the sameInfo
- Publication number
- JPS55138874A JPS55138874A JP4741779A JP4741779A JPS55138874A JP S55138874 A JPS55138874 A JP S55138874A JP 4741779 A JP4741779 A JP 4741779A JP 4741779 A JP4741779 A JP 4741779A JP S55138874 A JPS55138874 A JP S55138874A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- substrate
- silicon layer
- region
- polycrystalline silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 6
- 238000000034 method Methods 0.000 abstract 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 3
- 229920002120 photoresistant polymer Polymers 0.000 abstract 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 239000001257 hydrogen Substances 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 238000002955 isolation Methods 0.000 abstract 1
- 230000000873 masking effect Effects 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 239000012299 nitrogen atmosphere Substances 0.000 abstract 1
- 238000001020 plasma etching Methods 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 239000012808 vapor phase Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/28525—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table the conductive layers comprising semiconducting material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
- H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4741779A JPS55138874A (en) | 1979-04-18 | 1979-04-18 | Semiconductor device and method of fabricating the same |
DE8080301163T DE3068419D1 (en) | 1979-04-18 | 1980-04-10 | Process for producing an electrode on a semiconductor device |
EP80301163A EP0018175B1 (en) | 1979-04-18 | 1980-04-10 | Process for producing an electrode on a semiconductor device |
US06/139,168 US4348802A (en) | 1979-04-18 | 1980-04-11 | Process for producing a semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4741779A JPS55138874A (en) | 1979-04-18 | 1979-04-18 | Semiconductor device and method of fabricating the same |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55138874A true JPS55138874A (en) | 1980-10-30 |
Family
ID=12774569
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4741779A Pending JPS55138874A (en) | 1979-04-18 | 1979-04-18 | Semiconductor device and method of fabricating the same |
Country Status (4)
Country | Link |
---|---|
US (1) | US4348802A (ja) |
EP (1) | EP0018175B1 (ja) |
JP (1) | JPS55138874A (ja) |
DE (1) | DE3068419D1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0673370B2 (ja) * | 1982-08-18 | 1994-09-14 | エヌ・シー・アール・インターナショナル・インコーポレイテッド | 集積回路のコンタクト製造方法 |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0055521B1 (en) * | 1980-11-29 | 1985-05-22 | Kabushiki Kaisha Toshiba | Method of filling a groove in a semiconductor substrate |
JPS57126147A (en) * | 1981-01-28 | 1982-08-05 | Fujitsu Ltd | Manufacture of semiconductor device |
US4476621A (en) * | 1983-02-01 | 1984-10-16 | Gte Communications Products Corporation | Process for making transistors with doped oxide densification |
US4516145A (en) * | 1983-08-31 | 1985-05-07 | Storage Technology Partners | Reduction of contact resistance in CMOS integrated circuit chips and the product thereof |
US4499653A (en) * | 1983-11-03 | 1985-02-19 | Westinghouse Electric Corp. | Small dimension field effect transistor using phosphorous doped silicon glass reflow process |
US4603472A (en) * | 1984-04-19 | 1986-08-05 | Siemens Aktiengesellschaft | Method of making MOS FETs using silicate glass layer as gate edge masking for ion implantation |
US4525221A (en) * | 1984-05-16 | 1985-06-25 | Rca Corporation | Alloying of aluminum metallization |
US4606114A (en) * | 1984-08-29 | 1986-08-19 | Texas Instruments Incorporated | Multilevel oxide as diffusion source |
US4743564A (en) * | 1984-12-28 | 1988-05-10 | Kabushiki Kaisha Toshiba | Method for manufacturing a complementary MOS type semiconductor device |
US4733291A (en) * | 1985-11-15 | 1988-03-22 | American Telephone And Telegraph Company, At&T Bell Laboratories | Contact vias in semiconductor devices |
JPS63128750A (ja) * | 1986-11-19 | 1988-06-01 | Toshiba Corp | 半導体装置 |
JPH01255264A (ja) * | 1988-04-05 | 1989-10-12 | Seiko Instr Inc | 半導体装置の製造方法 |
JP2695185B2 (ja) * | 1988-05-02 | 1997-12-24 | 株式会社日立製作所 | 半導体集積回路装置及びその製造方法 |
US5545926A (en) | 1993-10-12 | 1996-08-13 | Kabushiki Kaisha Toshiba | Integrated mosfet device with low resistance peripheral diffusion region contacts and low PN-junction failure memory diffusion contacts |
US6004840A (en) * | 1994-04-15 | 1999-12-21 | Kabushiki Kaisha Toshiba | Method of fabricating a semiconductor device comprising a MOS portion and a bipolar portion |
US5681778A (en) * | 1995-11-27 | 1997-10-28 | Micron Technology, Inc. | Semiconductor processing method of forming a buried contact and conductive line |
US6872644B1 (en) * | 2001-07-03 | 2005-03-29 | Advanced Micro Devices, Inc. | Semiconductor device with non-compounded contacts, and method of making |
JP4604641B2 (ja) * | 2004-10-18 | 2011-01-05 | 株式会社デンソー | 半導体装置 |
US8058143B2 (en) | 2009-01-21 | 2011-11-15 | Freescale Semiconductor, Inc. | Substrate bonding with metal germanium silicon material |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5326585A (en) * | 1976-08-25 | 1978-03-11 | Hitachi Ltd | Production of mis semiconductor device |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3793721A (en) * | 1971-08-02 | 1974-02-26 | Texas Instruments Inc | Integrated circuit and method of fabrication |
GB1399163A (en) * | 1972-11-08 | 1975-06-25 | Ferranti Ltd | Methods of manufacturing semiconductor devices |
JPS5232680A (en) * | 1975-09-08 | 1977-03-12 | Toko Inc | Manufacturing process of insulation gate-type field-effect semiconduct or device |
US4013489A (en) * | 1976-02-10 | 1977-03-22 | Intel Corporation | Process for forming a low resistance interconnect in MOS N-channel silicon gate integrated circuit |
US4109372A (en) * | 1977-05-02 | 1978-08-29 | International Business Machines Corporation | Method for making an insulated gate field effect transistor utilizing a silicon gate and silicide interconnection vias |
JPS543480A (en) * | 1977-06-09 | 1979-01-11 | Fujitsu Ltd | Manufacture of semiconductor device |
US4221045A (en) * | 1978-06-06 | 1980-09-09 | Rockwell International Corporation | Self-aligned contacts in an ion implanted VLSI circuit |
-
1979
- 1979-04-18 JP JP4741779A patent/JPS55138874A/ja active Pending
-
1980
- 1980-04-10 DE DE8080301163T patent/DE3068419D1/de not_active Expired
- 1980-04-10 EP EP80301163A patent/EP0018175B1/en not_active Expired
- 1980-04-11 US US06/139,168 patent/US4348802A/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5326585A (en) * | 1976-08-25 | 1978-03-11 | Hitachi Ltd | Production of mis semiconductor device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0673370B2 (ja) * | 1982-08-18 | 1994-09-14 | エヌ・シー・アール・インターナショナル・インコーポレイテッド | 集積回路のコンタクト製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US4348802A (en) | 1982-09-14 |
EP0018175A3 (en) | 1981-10-07 |
DE3068419D1 (en) | 1984-08-09 |
EP0018175A2 (en) | 1980-10-29 |
EP0018175B1 (en) | 1984-07-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS55138874A (en) | Semiconductor device and method of fabricating the same | |
KR890702259A (ko) | 질화 규소 막을 갖는 태양 전지의 제조방법 | |
JPS5599722A (en) | Preparation of semiconductor device | |
JPS5544713A (en) | Semiconductor device | |
JPS5445583A (en) | Manufacture for semiconductor device | |
JPS5536927A (en) | Manufacturing of semiconductor device | |
JPS56148845A (en) | Manufacture of semiconductor device | |
JPS5546577A (en) | Method of fabricating semicondcutor device | |
JPS52124860A (en) | Electrode formation method for semiconductor devices | |
JPS5511167A (en) | Dry etching method | |
JPS5541727A (en) | Production of impatt diode | |
JPS56130940A (en) | Manufacture of semiconductor device | |
JPS5555547A (en) | Method of forming electrode and wiring layer of semiconductor device | |
JPS55134932A (en) | Preparation of semiconductor device | |
JPS5478659A (en) | Menufacture of semiconductor device | |
JPS54101292A (en) | Contact forming method | |
JPS5527659A (en) | Method of manufacturing semiconductor device | |
JPS54116882A (en) | Manufacture of semiconductor device | |
JPS54140884A (en) | Manufacture of semiconductor device | |
JPS5536926A (en) | Manufacturing of semiconductor device | |
JPS55125673A (en) | Manufacture of semiconductor device | |
JPS5671938A (en) | Manufacture of semiconductor device | |
JPS5518041A (en) | Method of fabricating semiconductor device | |
JPS56129324A (en) | Manufacture of semiconductor device | |
JPS5559764A (en) | Method of fabricating semiconductor device |