JPS55130893A - Single crystal drawing up apparatus - Google Patents

Single crystal drawing up apparatus

Info

Publication number
JPS55130893A
JPS55130893A JP3548479A JP3548479A JPS55130893A JP S55130893 A JPS55130893 A JP S55130893A JP 3548479 A JP3548479 A JP 3548479A JP 3548479 A JP3548479 A JP 3548479A JP S55130893 A JPS55130893 A JP S55130893A
Authority
JP
Japan
Prior art keywords
molten liquid
single crystal
crusible
rotating system
seed crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3548479A
Other languages
English (en)
Inventor
Sadao Yasuda
Yoshimitsu Sugita
Hiroo Tochikubo
Yushi Kase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3548479A priority Critical patent/JPS55130893A/ja
Publication of JPS55130893A publication Critical patent/JPS55130893A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP3548479A 1979-03-28 1979-03-28 Single crystal drawing up apparatus Pending JPS55130893A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3548479A JPS55130893A (en) 1979-03-28 1979-03-28 Single crystal drawing up apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3548479A JPS55130893A (en) 1979-03-28 1979-03-28 Single crystal drawing up apparatus

Publications (1)

Publication Number Publication Date
JPS55130893A true JPS55130893A (en) 1980-10-11

Family

ID=12443017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3548479A Pending JPS55130893A (en) 1979-03-28 1979-03-28 Single crystal drawing up apparatus

Country Status (1)

Country Link
JP (1) JPS55130893A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6036392A (ja) * 1983-08-05 1985-02-25 Toshiba Corp 単結晶引上装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6036392A (ja) * 1983-08-05 1985-02-25 Toshiba Corp 単結晶引上装置

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