JPS55104996A - Single crystal pulling device - Google Patents
Single crystal pulling deviceInfo
- Publication number
- JPS55104996A JPS55104996A JP1035179A JP1035179A JPS55104996A JP S55104996 A JPS55104996 A JP S55104996A JP 1035179 A JP1035179 A JP 1035179A JP 1035179 A JP1035179 A JP 1035179A JP S55104996 A JPS55104996 A JP S55104996A
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- melt
- magnets
- pulling device
- stand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To enable a uniform high-quality single crystal to be pulled by preventing vibration of a Czochralski method single crystal pulling device with mechanism provided with magnets.
CONSTITUTION: Reaction tube 1 is evacuated from exhaust port 2b, and inert gas is fed from discharge hole 2a to form an inert atmosphere in tube 1. A base material in crucible 6 is heated with high output heater 5 and converted into melt 9 for growing. Electric motor 19b is driven to lower moving stand 18 along sliding shaft 16, and simultaneously with dipping seed crystal 10 in melt 9 rotary shaft 12 is rotated by electric motor 19a. Next jacks 26a, 26b are adjusted with a horizontal standard to maintain stand 23 horizontal. By the repulsive power between stand 23 side magnets 25a, 25b and magnets 28a, 28b on the bottoms of cylinders 27a, 27b the single crystal pulling device is insulated from the outside, so melt 9 is not affected by external vibration to prevent the melt surface from rippling. Accordingly, by pulling holder 11 with rotation high-quality single crystal 24 is grown.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1035179A JPS55104996A (en) | 1979-02-02 | 1979-02-02 | Single crystal pulling device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1035179A JPS55104996A (en) | 1979-02-02 | 1979-02-02 | Single crystal pulling device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55104996A true JPS55104996A (en) | 1980-08-11 |
Family
ID=11747759
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1035179A Pending JPS55104996A (en) | 1979-02-02 | 1979-02-02 | Single crystal pulling device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55104996A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1029955A1 (en) * | 1997-08-19 | 2000-08-23 | Shin-Etsu Handotai Co., Ltd | Apparatus and method for producing single crystal |
-
1979
- 1979-02-02 JP JP1035179A patent/JPS55104996A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1029955A1 (en) * | 1997-08-19 | 2000-08-23 | Shin-Etsu Handotai Co., Ltd | Apparatus and method for producing single crystal |
EP1029955A4 (en) * | 1997-08-19 | 2003-07-16 | Shinetsu Handotai Kk | Apparatus and method for producing single crystal |
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