JPS5490085A - Single crystal pulling apparatus - Google Patents
Single crystal pulling apparatusInfo
- Publication number
- JPS5490085A JPS5490085A JP15903477A JP15903477A JPS5490085A JP S5490085 A JPS5490085 A JP S5490085A JP 15903477 A JP15903477 A JP 15903477A JP 15903477 A JP15903477 A JP 15903477A JP S5490085 A JPS5490085 A JP S5490085A
- Authority
- JP
- Japan
- Prior art keywords
- crystals
- crucible
- base
- crystalization
- shafts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To provide a single crystal pulling apparatus which enables simultaneous production of plural single crystals and efficient massproduction through simultaneos pulling of the crystals being turned from growth solutions respectively arranged in the crucible by types.
CONSTITUTION: A given base material for crystalization is placed into a crucible 13 in a reactor 11. After an exhaustion down to about 10-2 to 10-3 Torr as shown by 11b, inert gas such as Ar is introduced. Then, the material in the crucible 13 is heated 12 until it is turned to a crystalization solution and retained at a given temperature. Subsequently, with a travelling base 21 driven downward, respective retaining devices 18a to 18d are lowered together with the shafts 19a to 19d whereby seed crystals 17 for growth is emmersed into the solution 16. Simultaneously, with the rotation of a rotating shaft 24, the shafts 19a to 19d are rotated together through gears 25 and 26a to 26d so that the crystals 17 turn properly. Then, with the base 21 driven upward, the crystals are pulled at a given rate rotating the retaining devices 18a to 18d. In this manner, four single crystals can be made to grow on the respective seed crystals 17 simultaneously.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15903477A JPS5490085A (en) | 1977-12-28 | 1977-12-28 | Single crystal pulling apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15903477A JPS5490085A (en) | 1977-12-28 | 1977-12-28 | Single crystal pulling apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5490085A true JPS5490085A (en) | 1979-07-17 |
Family
ID=15684798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15903477A Pending JPS5490085A (en) | 1977-12-28 | 1977-12-28 | Single crystal pulling apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5490085A (en) |
-
1977
- 1977-12-28 JP JP15903477A patent/JPS5490085A/en active Pending
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