JPS55129739A - Detector for external atmosphere - Google Patents
Detector for external atmosphereInfo
- Publication number
- JPS55129739A JPS55129739A JP3691879A JP3691879A JPS55129739A JP S55129739 A JPS55129739 A JP S55129739A JP 3691879 A JP3691879 A JP 3691879A JP 3691879 A JP3691879 A JP 3691879A JP S55129739 A JPS55129739 A JP S55129739A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- charge
- constitution
- changed
- insulation layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009413 insulation Methods 0.000 abstract 3
- 238000002347 injection Methods 0.000 abstract 2
- 239000007924 injection Substances 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 abstract 2
- 239000011540 sensing material Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3691879A JPS55129739A (en) | 1979-03-30 | 1979-03-30 | Detector for external atmosphere |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3691879A JPS55129739A (en) | 1979-03-30 | 1979-03-30 | Detector for external atmosphere |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55129739A true JPS55129739A (en) | 1980-10-07 |
JPS6120809B2 JPS6120809B2 (enrdf_load_stackoverflow) | 1986-05-23 |
Family
ID=12483137
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3691879A Granted JPS55129739A (en) | 1979-03-30 | 1979-03-30 | Detector for external atmosphere |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55129739A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001194332A (ja) * | 2000-01-07 | 2001-07-19 | Seiko Instruments Inc | 湿度センサ |
JP2009047675A (ja) * | 2007-03-30 | 2009-03-05 | Ideal Star Inc | ガスセンサー、そのための気体検知モジュール、およびこれらを用いた気体計測システム |
JP2009236502A (ja) * | 2008-03-25 | 2009-10-15 | Toyohashi Univ Of Technology | 化学・物理現象検出装置及びその制御方法 |
-
1979
- 1979-03-30 JP JP3691879A patent/JPS55129739A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001194332A (ja) * | 2000-01-07 | 2001-07-19 | Seiko Instruments Inc | 湿度センサ |
JP2009047675A (ja) * | 2007-03-30 | 2009-03-05 | Ideal Star Inc | ガスセンサー、そのための気体検知モジュール、およびこれらを用いた気体計測システム |
JP2009236502A (ja) * | 2008-03-25 | 2009-10-15 | Toyohashi Univ Of Technology | 化学・物理現象検出装置及びその制御方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6120809B2 (enrdf_load_stackoverflow) | 1986-05-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS51150692A (en) | High conductivity composed substance | |
JPS5279679A (en) | Semiconductor memory device | |
JPS55129741A (en) | Detector for external atmosphere | |
JPS55129740A (en) | Detector for external atmosphere | |
JPS55129739A (en) | Detector for external atmosphere | |
JPS5323281A (en) | Charge transfer el ement | |
JPS5467393A (en) | High dielectric strength semiconductor element | |
JPS53125278A (en) | Photo detecting display element | |
JPS5249489A (en) | Transparent multi-layer conductive film | |
JPS5779663A (en) | Semiconductor device | |
JPS5618751A (en) | Gas detector | |
JPS5360171A (en) | Electrode for silicon substrate and its production | |
JPS5522885A (en) | Insulation gate type field effect semiconductor device | |
JPS5680166A (en) | Charge-coupled memory device | |
JPS558036A (en) | Electrode formation | |
JPS5354989A (en) | Semiconductor device | |
JPS55158549A (en) | Production of sensor | |
JPS52141257A (en) | Sonde for detecting charged stacking layer thickness | |
JPS5693037A (en) | Semiconductor gas sensor | |
JPS55110056A (en) | Semiconductor device | |
JPS5577172A (en) | Semiconductor device | |
JPS5267981A (en) | Manufacture of semiconductor unit | |
JPS5466089A (en) | Semiconductor capacitor device | |
JPS55102155A (en) | Gas discharge indicator | |
JPS5468162A (en) | Semiconductor device |