JPS55126954A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
JPS55126954A
JPS55126954A JP3391079A JP3391079A JPS55126954A JP S55126954 A JPS55126954 A JP S55126954A JP 3391079 A JP3391079 A JP 3391079A JP 3391079 A JP3391079 A JP 3391079A JP S55126954 A JPS55126954 A JP S55126954A
Authority
JP
Japan
Prior art keywords
acceleration voltage
circuit
control circuit
image
acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3391079A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6155735B2 (enrdf_load_stackoverflow
Inventor
Setsuo Norioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP3391079A priority Critical patent/JPS55126954A/ja
Publication of JPS55126954A publication Critical patent/JPS55126954A/ja
Publication of JPS6155735B2 publication Critical patent/JPS6155735B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP3391079A 1979-03-23 1979-03-23 Scanning electron microscope Granted JPS55126954A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3391079A JPS55126954A (en) 1979-03-23 1979-03-23 Scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3391079A JPS55126954A (en) 1979-03-23 1979-03-23 Scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS55126954A true JPS55126954A (en) 1980-10-01
JPS6155735B2 JPS6155735B2 (enrdf_load_stackoverflow) 1986-11-28

Family

ID=12399663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3391079A Granted JPS55126954A (en) 1979-03-23 1979-03-23 Scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS55126954A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5914262U (ja) * 1982-07-20 1984-01-28 日本電子株式会社 電子顕微鏡における自動撮影装置
EP1353356A3 (en) * 2002-04-11 2005-07-20 Keyence Corporation Electron microscope charge-up prevention method and electron microscope

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5427354A (en) * 1977-08-01 1979-03-01 Hitachi Ltd Scan-type electronic microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5427354A (en) * 1977-08-01 1979-03-01 Hitachi Ltd Scan-type electronic microscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5914262U (ja) * 1982-07-20 1984-01-28 日本電子株式会社 電子顕微鏡における自動撮影装置
EP1353356A3 (en) * 2002-04-11 2005-07-20 Keyence Corporation Electron microscope charge-up prevention method and electron microscope

Also Published As

Publication number Publication date
JPS6155735B2 (enrdf_load_stackoverflow) 1986-11-28

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