JPS6155735B2 - - Google Patents

Info

Publication number
JPS6155735B2
JPS6155735B2 JP54033910A JP3391079A JPS6155735B2 JP S6155735 B2 JPS6155735 B2 JP S6155735B2 JP 54033910 A JP54033910 A JP 54033910A JP 3391079 A JP3391079 A JP 3391079A JP S6155735 B2 JPS6155735 B2 JP S6155735B2
Authority
JP
Japan
Prior art keywords
electron beam
sample
switching
scanning
acceleration voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54033910A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55126954A (en
Inventor
Setsuo Norioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP3391079A priority Critical patent/JPS55126954A/ja
Publication of JPS55126954A publication Critical patent/JPS55126954A/ja
Publication of JPS6155735B2 publication Critical patent/JPS6155735B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP3391079A 1979-03-23 1979-03-23 Scanning electron microscope Granted JPS55126954A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3391079A JPS55126954A (en) 1979-03-23 1979-03-23 Scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3391079A JPS55126954A (en) 1979-03-23 1979-03-23 Scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS55126954A JPS55126954A (en) 1980-10-01
JPS6155735B2 true JPS6155735B2 (enrdf_load_stackoverflow) 1986-11-28

Family

ID=12399663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3391079A Granted JPS55126954A (en) 1979-03-23 1979-03-23 Scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS55126954A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5914262U (ja) * 1982-07-20 1984-01-28 日本電子株式会社 電子顕微鏡における自動撮影装置
JP3934461B2 (ja) * 2002-04-11 2007-06-20 株式会社キーエンス 電子顕微鏡のチャージアップ防止方法および電子顕微鏡

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5842938B2 (ja) * 1977-08-01 1983-09-22 株式会社日立製作所 走査形電子顕微鏡

Also Published As

Publication number Publication date
JPS55126954A (en) 1980-10-01

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