JPS55113344A - Electrode wiring and its manufacture - Google Patents
Electrode wiring and its manufactureInfo
- Publication number
- JPS55113344A JPS55113344A JP1982279A JP1982279A JPS55113344A JP S55113344 A JPS55113344 A JP S55113344A JP 1982279 A JP1982279 A JP 1982279A JP 1982279 A JP1982279 A JP 1982279A JP S55113344 A JPS55113344 A JP S55113344A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- film
- electrode wiring
- hole
- upper electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 3
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 1
- 230000010354 integration Effects 0.000 abstract 1
- 239000011229 interlayer Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 1
- 230000000717 retained effect Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Landscapes
- Weting (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982279A JPS55113344A (en) | 1979-02-23 | 1979-02-23 | Electrode wiring and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982279A JPS55113344A (en) | 1979-02-23 | 1979-02-23 | Electrode wiring and its manufacture |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP490286A Division JPS61179556A (ja) | 1986-01-16 | 1986-01-16 | 電極配線 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55113344A true JPS55113344A (en) | 1980-09-01 |
| JPS6214095B2 JPS6214095B2 (enrdf_load_stackoverflow) | 1987-03-31 |
Family
ID=12009998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1982279A Granted JPS55113344A (en) | 1979-02-23 | 1979-02-23 | Electrode wiring and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55113344A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58191451A (ja) * | 1982-04-14 | 1983-11-08 | コミツサリア・タ・レネルギ−・アトミ−ク | 集積回路の電気接触用孔への相互接続線の位置決め形成方法 |
| JPS59181032A (ja) * | 1983-03-18 | 1984-10-15 | コミサリヤ・ア・レネルジ・アトミク | 集積回路の電気接触口上に相互接続線を配置する方法 |
| US5247191A (en) * | 1990-08-02 | 1993-09-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| US6051885A (en) * | 1997-07-29 | 2000-04-18 | Kabushiki Kaisha Toshiba | Semiconductor device having a conductor with a wedge shaped depression |
-
1979
- 1979-02-23 JP JP1982279A patent/JPS55113344A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58191451A (ja) * | 1982-04-14 | 1983-11-08 | コミツサリア・タ・レネルギ−・アトミ−ク | 集積回路の電気接触用孔への相互接続線の位置決め形成方法 |
| JPS59181032A (ja) * | 1983-03-18 | 1984-10-15 | コミサリヤ・ア・レネルジ・アトミク | 集積回路の電気接触口上に相互接続線を配置する方法 |
| US5247191A (en) * | 1990-08-02 | 1993-09-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| US6051885A (en) * | 1997-07-29 | 2000-04-18 | Kabushiki Kaisha Toshiba | Semiconductor device having a conductor with a wedge shaped depression |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6214095B2 (enrdf_load_stackoverflow) | 1987-03-31 |
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