JPS55105364A - Semiconductor memory and its manufacture - Google Patents

Semiconductor memory and its manufacture

Info

Publication number
JPS55105364A
JPS55105364A JP1370879A JP1370879A JPS55105364A JP S55105364 A JPS55105364 A JP S55105364A JP 1370879 A JP1370879 A JP 1370879A JP 1370879 A JP1370879 A JP 1370879A JP S55105364 A JPS55105364 A JP S55105364A
Authority
JP
Japan
Prior art keywords
oxide film
film
layers
gate
transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1370879A
Other languages
English (en)
Other versions
JPS5829627B2 (ja
Inventor
Eisuke Ichinohe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP54013708A priority Critical patent/JPS5829627B2/ja
Publication of JPS55105364A publication Critical patent/JPS55105364A/ja
Publication of JPS5829627B2 publication Critical patent/JPS5829627B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Read Only Memory (AREA)
  • Semiconductor Memories (AREA)
JP54013708A 1979-02-07 1979-02-07 半導体記憶装置およびその製造方法 Expired JPS5829627B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54013708A JPS5829627B2 (ja) 1979-02-07 1979-02-07 半導体記憶装置およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54013708A JPS5829627B2 (ja) 1979-02-07 1979-02-07 半導体記憶装置およびその製造方法

Publications (2)

Publication Number Publication Date
JPS55105364A true JPS55105364A (en) 1980-08-12
JPS5829627B2 JPS5829627B2 (ja) 1983-06-23

Family

ID=11840717

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54013708A Expired JPS5829627B2 (ja) 1979-02-07 1979-02-07 半導体記憶装置およびその製造方法

Country Status (1)

Country Link
JP (1) JPS5829627B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS583192A (ja) * 1981-06-30 1983-01-08 Fujitsu Ltd 読み出し専用メモリ
JPS58188155A (ja) * 1982-04-27 1983-11-02 Seiko Epson Corp ２層構造ｒｏｍ集積回路
JPS59127869A (ja) * 1983-01-12 1984-07-23 Sanyo Electric Co Ltd Ｒｏｍ半導体装置の製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0334315U (ja) * 1989-08-10 1991-04-04

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
IBM TECHNICAL DISCLOSURE BULLETIN=1973 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS583192A (ja) * 1981-06-30 1983-01-08 Fujitsu Ltd 読み出し専用メモリ
JPS58188155A (ja) * 1982-04-27 1983-11-02 Seiko Epson Corp ２層構造ｒｏｍ集積回路
JPS59127869A (ja) * 1983-01-12 1984-07-23 Sanyo Electric Co Ltd Ｒｏｍ半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5829627B2 (ja) 1983-06-23

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