JPS5482166A - Liquid-phase grow device for semiconductor - Google Patents
Liquid-phase grow device for semiconductorInfo
- Publication number
- JPS5482166A JPS5482166A JP14929177A JP14929177A JPS5482166A JP S5482166 A JPS5482166 A JP S5482166A JP 14929177 A JP14929177 A JP 14929177A JP 14929177 A JP14929177 A JP 14929177A JP S5482166 A JPS5482166 A JP S5482166A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- solution
- tank
- storage part
- substrate storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Led Devices (AREA)
Abstract
PURPOSE: To prevent the solution from moving toward the substrate storage part even with some bending of the patition plate caused by a large amount of the solution, by providing small holes to the bottom of the solution tank as well as to the moving plate.
CONSTITUTION: Solution tank 4 is provided at the upper part of substrate storage part 1, and crystal solution 5 is flowed into tank 4. Moving plate 6 is put close onto the bottom of tank 4, and small hole 7 and 8 are provided to the bottom of tank 4 and plate 6. Then plate 6 is moved with operation of rod 9 to make the holes coincide to each other, thus slution 5 being flowed to the substrate storage part. Moving plate 10 under the substrate storage part is operated with rod 12 to make small hole 14 of plate 10 coincide with small hole 13 of the bottom plate at the substrate storage part, and thus the solution flows out to tank 11. Both tnak 4 and plate 6 bend together, so no gap is caused with no touch of solution 5 to the substrate before operation of the moving plate. As a result, the growth layer can be obtained with an optional thickness.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14929177A JPS5482166A (en) | 1977-12-14 | 1977-12-14 | Liquid-phase grow device for semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14929177A JPS5482166A (en) | 1977-12-14 | 1977-12-14 | Liquid-phase grow device for semiconductor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5482166A true JPS5482166A (en) | 1979-06-30 |
Family
ID=15471960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14929177A Pending JPS5482166A (en) | 1977-12-14 | 1977-12-14 | Liquid-phase grow device for semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5482166A (en) |
-
1977
- 1977-12-14 JP JP14929177A patent/JPS5482166A/en active Pending
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