JPS5476069A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5476069A
JPS5476069A JP14359377A JP14359377A JPS5476069A JP S5476069 A JPS5476069 A JP S5476069A JP 14359377 A JP14359377 A JP 14359377A JP 14359377 A JP14359377 A JP 14359377A JP S5476069 A JPS5476069 A JP S5476069A
Authority
JP
Japan
Prior art keywords
gate
film
oxide film
electrode
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14359377A
Other languages
English (en)
Other versions
JPS6133263B2 (ja
Inventor
Kazunori Imaoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14359377A priority Critical patent/JPS5476069A/ja
Publication of JPS5476069A publication Critical patent/JPS5476069A/ja
Publication of JPS6133263B2 publication Critical patent/JPS6133263B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP14359377A 1977-11-30 1977-11-30 Manufacture of semiconductor device Granted JPS5476069A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14359377A JPS5476069A (en) 1977-11-30 1977-11-30 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14359377A JPS5476069A (en) 1977-11-30 1977-11-30 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5476069A true JPS5476069A (en) 1979-06-18
JPS6133263B2 JPS6133263B2 (ja) 1986-08-01

Family

ID=15342322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14359377A Granted JPS5476069A (en) 1977-11-30 1977-11-30 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5476069A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56115569A (en) * 1980-02-18 1981-09-10 Nippon Telegr & Teleph Corp <Ntt> Manufacture of mis field effect transistor integrated circuit device
JPS57167677A (en) * 1981-03-31 1982-10-15 Fujitsu Ltd Semiconductor device and manufacture thereof
JPS58147071A (ja) * 1981-12-16 1983-09-01 ソーン、イーエムアイ、ノース、アメリカ、インコーポレーテッド Ｍｏｓ半導体装置の製造方法
US5244621A (en) * 1989-12-26 1993-09-14 Mitsubishi Gas Chemical Company, Inc. Process for shaping ceramic composites

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56115569A (en) * 1980-02-18 1981-09-10 Nippon Telegr & Teleph Corp <Ntt> Manufacture of mis field effect transistor integrated circuit device
JPS57167677A (en) * 1981-03-31 1982-10-15 Fujitsu Ltd Semiconductor device and manufacture thereof
JPS58147071A (ja) * 1981-12-16 1983-09-01 ソーン、イーエムアイ、ノース、アメリカ、インコーポレーテッド Ｍｏｓ半導体装置の製造方法
US5244621A (en) * 1989-12-26 1993-09-14 Mitsubishi Gas Chemical Company, Inc. Process for shaping ceramic composites

Also Published As

Publication number Publication date
JPS6133263B2 (ja) 1986-08-01

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