JPS5475282A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5475282A
JPS5475282A JP14319077A JP14319077A JPS5475282A JP S5475282 A JPS5475282 A JP S5475282A JP 14319077 A JP14319077 A JP 14319077A JP 14319077 A JP14319077 A JP 14319077A JP S5475282 A JPS5475282 A JP S5475282A
Authority
JP
Japan
Prior art keywords
layer
type
film
epitaxial
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14319077A
Other languages
English (en)
Other versions
JPS5731295B2 (ja
Inventor
Yoshinobu Monma
Yunosuke Kawabe
Osamu Hataishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14319077A priority Critical patent/JPS5475282A/ja
Publication of JPS5475282A publication Critical patent/JPS5475282A/ja
Priority to US06/240,498 priority patent/USRE31937E/en
Publication of JPS5731295B2 publication Critical patent/JPS5731295B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Element Separation (AREA)
JP14319077A 1977-11-29 1977-11-29 Manufacture of semiconductor device Granted JPS5475282A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP14319077A JPS5475282A (en) 1977-11-29 1977-11-29 Manufacture of semiconductor device
US06/240,498 USRE31937E (en) 1977-11-29 1981-03-04 Semiconductor device and method for its preparation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14319077A JPS5475282A (en) 1977-11-29 1977-11-29 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5475282A true JPS5475282A (en) 1979-06-15
JPS5731295B2 JPS5731295B2 (ja) 1982-07-03

Family

ID=15332960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14319077A Granted JPS5475282A (en) 1977-11-29 1977-11-29 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5475282A (ja)

Also Published As

Publication number Publication date
JPS5731295B2 (ja) 1982-07-03

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