JPS5468179A - Forming method of wiring layer having minute interval - Google Patents
Forming method of wiring layer having minute intervalInfo
- Publication number
- JPS5468179A JPS5468179A JP13526177A JP13526177A JPS5468179A JP S5468179 A JPS5468179 A JP S5468179A JP 13526177 A JP13526177 A JP 13526177A JP 13526177 A JP13526177 A JP 13526177A JP S5468179 A JPS5468179 A JP S5468179A
- Authority
- JP
- Japan
- Prior art keywords
- wiring layers
- photo
- resistor film
- wiring layer
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13526177A JPS5468179A (en) | 1977-11-11 | 1977-11-11 | Forming method of wiring layer having minute interval |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13526177A JPS5468179A (en) | 1977-11-11 | 1977-11-11 | Forming method of wiring layer having minute interval |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5468179A true JPS5468179A (en) | 1979-06-01 |
Family
ID=15147558
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13526177A Pending JPS5468179A (en) | 1977-11-11 | 1977-11-11 | Forming method of wiring layer having minute interval |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5468179A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04278531A (ja) * | 1991-03-06 | 1992-10-05 | Fujitsu Ltd | 凹凸断面形状を有する半導体デバイスの製造方法 |
-
1977
- 1977-11-11 JP JP13526177A patent/JPS5468179A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04278531A (ja) * | 1991-03-06 | 1992-10-05 | Fujitsu Ltd | 凹凸断面形状を有する半導体デバイスの製造方法 |
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