JPS5462839A - Thin film heat sensitive head - Google Patents
Thin film heat sensitive headInfo
- Publication number
- JPS5462839A JPS5462839A JP13003077A JP13003077A JPS5462839A JP S5462839 A JPS5462839 A JP S5462839A JP 13003077 A JP13003077 A JP 13003077A JP 13003077 A JP13003077 A JP 13003077A JP S5462839 A JPS5462839 A JP S5462839A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- resistors
- entire surface
- layers
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To enable printing of good sharpness to be obtained by forming abrasion resistant layers mutually independently together with thin film resistors thereby thermally separating them in the thin-film heat sensitive head of a thermal printer.
CONSTITUTION: A glaze layer 2, thin-film resistors 3, electrodes 4 for current supplying to the resistors 3 and an oxidation resistant layer 5 evenly covering the entire surface are provided on one side of a substrate 1 such as alumina. Next, a Ta metal layer 7 is formed over the entire surface by a sputtering process or the like and further a photo resist film is formed over the entire surface thereof. Next, the photo resist film of the portions opposing to the resistors 3 is removed by photomechanical techniques and in this state the layer 7 is oxidized to Ta2O5 down to a required depth by an anodic oxidation process, whereby abrasion resistant layers 6 are formed. Next, with the layers 6 as a mask, the remaining layers 6 where Ta2O5 has not been formed are etched away by a Ta layer etching solution of NH4F-NHO3 base.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13003077A JPS5462839A (en) | 1977-10-28 | 1977-10-28 | Thin film heat sensitive head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13003077A JPS5462839A (en) | 1977-10-28 | 1977-10-28 | Thin film heat sensitive head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5462839A true JPS5462839A (en) | 1979-05-21 |
Family
ID=15024406
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13003077A Pending JPS5462839A (en) | 1977-10-28 | 1977-10-28 | Thin film heat sensitive head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5462839A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56126181A (en) * | 1980-03-10 | 1981-10-02 | Nec Corp | Heat-sensitive recording head |
-
1977
- 1977-10-28 JP JP13003077A patent/JPS5462839A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56126181A (en) * | 1980-03-10 | 1981-10-02 | Nec Corp | Heat-sensitive recording head |
JPH0152188B2 (en) * | 1980-03-10 | 1989-11-08 | Nippon Electric Co |
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