JPS55107487A - Method for formation of exothermic resistor for heat sensible recording head - Google Patents
Method for formation of exothermic resistor for heat sensible recording headInfo
- Publication number
- JPS55107487A JPS55107487A JP1423179A JP1423179A JPS55107487A JP S55107487 A JPS55107487 A JP S55107487A JP 1423179 A JP1423179 A JP 1423179A JP 1423179 A JP1423179 A JP 1423179A JP S55107487 A JPS55107487 A JP S55107487A
- Authority
- JP
- Japan
- Prior art keywords
- film
- resistor
- patern
- tantalate
- recording head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To reduce the manufacturing process of the exothermic resistor for the heat sensible recording head greatly, and to lower the manufacturing cost, by forming the resistor patern as the result of trimming the resistance film formed on the substrate by means of a laser trimmer.
CONSTITUTION: Thin film resistant film 4 consisting of nitriding tantalate is formed on alumina substrate 8 provided with grades, which is done by means of the mask spattering, then, the resistant film 4 consisting of nitride tantalate is divided by space 9 formed by means of trimming using a laser trimmer, to form the resistor patern. Next, conductive film 5 is formed by means of an usual vacuum evaculation method, and then the patern of the conductive film 5 is formed by means of photographic etching. Next, silicon oxide film 6 and tantalate pentoxide film 7 are sequentially formed as the resistor protection layer by means of a spattering method.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1423179A JPS55107487A (en) | 1979-02-13 | 1979-02-13 | Method for formation of exothermic resistor for heat sensible recording head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1423179A JPS55107487A (en) | 1979-02-13 | 1979-02-13 | Method for formation of exothermic resistor for heat sensible recording head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55107487A true JPS55107487A (en) | 1980-08-18 |
Family
ID=11855290
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1423179A Pending JPS55107487A (en) | 1979-02-13 | 1979-02-13 | Method for formation of exothermic resistor for heat sensible recording head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55107487A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110126477A (en) * | 2019-06-11 | 2019-08-16 | 山东华菱电子股份有限公司 | A kind of film thermal printing head repairs resistance method and device |
-
1979
- 1979-02-13 JP JP1423179A patent/JPS55107487A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110126477A (en) * | 2019-06-11 | 2019-08-16 | 山东华菱电子股份有限公司 | A kind of film thermal printing head repairs resistance method and device |
CN110126477B (en) * | 2019-06-11 | 2020-03-06 | 山东华菱电子股份有限公司 | Method and device for repairing resistance of thin-film thermal sensitive printing head |
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