JPS5449076A - Manufacture of schottky barrier diode - Google Patents
Manufacture of schottky barrier diodeInfo
- Publication number
- JPS5449076A JPS5449076A JP11584177A JP11584177A JPS5449076A JP S5449076 A JPS5449076 A JP S5449076A JP 11584177 A JP11584177 A JP 11584177A JP 11584177 A JP11584177 A JP 11584177A JP S5449076 A JPS5449076 A JP S5449076A
- Authority
- JP
- Japan
- Prior art keywords
- schottky barrier
- manufacture
- barrier diode
- layer
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To manufacture a Schottky barrier diode with a small parasitic capacity of a metal electrode via a SiO2 film.
CONSTITUTION: Onto Si substrate 3, Si3N46 as large as the Schottky barrier SB diameter is provided, and heat-oxidized after being processed in a HF solution into porous, thereby forming layer 7. Film 6 is removed, and SB metal 8 is provided covering the exposed part, so that a SB diode with the desired diameter can be formed. The thickness of layer 7 can be adjusted to a needed value while substrate 5 is made porous, so that the parasitic capacity through layer 7 can be made small sufficiently
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11584177A JPS5449076A (en) | 1977-09-26 | 1977-09-26 | Manufacture of schottky barrier diode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11584177A JPS5449076A (en) | 1977-09-26 | 1977-09-26 | Manufacture of schottky barrier diode |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5449076A true JPS5449076A (en) | 1979-04-18 |
Family
ID=14672439
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11584177A Pending JPS5449076A (en) | 1977-09-26 | 1977-09-26 | Manufacture of schottky barrier diode |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5449076A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2262186A (en) * | 1991-12-04 | 1993-06-09 | Philips Electronic Associated | A capacitive structure for a semiconductor device |
-
1977
- 1977-09-26 JP JP11584177A patent/JPS5449076A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2262186A (en) * | 1991-12-04 | 1993-06-09 | Philips Electronic Associated | A capacitive structure for a semiconductor device |
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