JPS5448181A - Multi-layer electrode wiring and its forming method - Google Patents
Multi-layer electrode wiring and its forming methodInfo
- Publication number
- JPS5448181A JPS5448181A JP11459377A JP11459377A JPS5448181A JP S5448181 A JPS5448181 A JP S5448181A JP 11459377 A JP11459377 A JP 11459377A JP 11459377 A JP11459377 A JP 11459377A JP S5448181 A JPS5448181 A JP S5448181A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- wiring
- wirings
- resist
- layer wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11459377A JPS5448181A (en) | 1977-09-26 | 1977-09-26 | Multi-layer electrode wiring and its forming method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11459377A JPS5448181A (en) | 1977-09-26 | 1977-09-26 | Multi-layer electrode wiring and its forming method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5448181A true JPS5448181A (en) | 1979-04-16 |
Family
ID=14641731
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11459377A Pending JPS5448181A (en) | 1977-09-26 | 1977-09-26 | Multi-layer electrode wiring and its forming method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5448181A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57133648A (en) * | 1981-02-12 | 1982-08-18 | Nec Corp | Integrated circuit device |
JPS6086847A (ja) * | 1983-10-19 | 1985-05-16 | Toshiba Corp | 半導体装置の製造方法 |
JPS647540A (en) * | 1987-06-30 | 1989-01-11 | Fujitsu Ltd | Manufacture of semiconductor device |
US5219713A (en) * | 1990-12-17 | 1993-06-15 | Rockwell International Corporation | Multi-layer photoresist air bridge fabrication method |
-
1977
- 1977-09-26 JP JP11459377A patent/JPS5448181A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57133648A (en) * | 1981-02-12 | 1982-08-18 | Nec Corp | Integrated circuit device |
JPS6086847A (ja) * | 1983-10-19 | 1985-05-16 | Toshiba Corp | 半導体装置の製造方法 |
JPS647540A (en) * | 1987-06-30 | 1989-01-11 | Fujitsu Ltd | Manufacture of semiconductor device |
US5219713A (en) * | 1990-12-17 | 1993-06-15 | Rockwell International Corporation | Multi-layer photoresist air bridge fabrication method |
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