JPS54134937A - Manufacture of magnetic bubble chip - Google Patents
Manufacture of magnetic bubble chipInfo
- Publication number
- JPS54134937A JPS54134937A JP4262878A JP4262878A JPS54134937A JP S54134937 A JPS54134937 A JP S54134937A JP 4262878 A JP4262878 A JP 4262878A JP 4262878 A JP4262878 A JP 4262878A JP S54134937 A JPS54134937 A JP S54134937A
- Authority
- JP
- Japan
- Prior art keywords
- insulator film
- electric insulator
- magnetic bubble
- pattern
- permalloy pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To fix a Permalloy pattern away from the surface of a magnetic bubble wafer at an adequate interval, by etching an electric insulator film at a specific part among places where the Permalloy pattern should be formed.
CONSTITUTION: On wafer 1 of a magnetic bubble material, the 1st electric insulator film 2 as a space layer, the 2nd electric insulator film 4 formed on the entire surface including conductor pattern 3 as control wiring of a generator, a gate, a replicator, etc., and Permalloy pattern 5 for a transfer path, the gate, the replicator, a detector, etc., are formed. Before the formation of Permalloy pattern 5, the 1st electric insulator film 2 and/or the 2nd electric insulator film 4 at specific parts amoug places where the Permalloy pattern 5 is formed are/is etched.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4262878A JPS54134937A (en) | 1978-04-13 | 1978-04-13 | Manufacture of magnetic bubble chip |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4262878A JPS54134937A (en) | 1978-04-13 | 1978-04-13 | Manufacture of magnetic bubble chip |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54134937A true JPS54134937A (en) | 1979-10-19 |
Family
ID=12641270
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4262878A Pending JPS54134937A (en) | 1978-04-13 | 1978-04-13 | Manufacture of magnetic bubble chip |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54134937A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56143585A (en) * | 1980-04-09 | 1981-11-09 | Nec Corp | Magnetic bubble element |
JPS58177585A (en) * | 1982-04-09 | 1983-10-18 | Hitachi Ltd | Magnetic bubble memory element |
JPS6074192A (en) * | 1983-09-30 | 1985-04-26 | Fujitsu Ltd | Method for forming bubble memory |
-
1978
- 1978-04-13 JP JP4262878A patent/JPS54134937A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56143585A (en) * | 1980-04-09 | 1981-11-09 | Nec Corp | Magnetic bubble element |
JPS58177585A (en) * | 1982-04-09 | 1983-10-18 | Hitachi Ltd | Magnetic bubble memory element |
JPS6074192A (en) * | 1983-09-30 | 1985-04-26 | Fujitsu Ltd | Method for forming bubble memory |
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