JPS5443688A - Production of semiconductor integrated circuit unit - Google Patents
Production of semiconductor integrated circuit unitInfo
- Publication number
- JPS5443688A JPS5443688A JP10987777A JP10987777A JPS5443688A JP S5443688 A JPS5443688 A JP S5443688A JP 10987777 A JP10987777 A JP 10987777A JP 10987777 A JP10987777 A JP 10987777A JP S5443688 A JPS5443688 A JP S5443688A
- Authority
- JP
- Japan
- Prior art keywords
- type
- area
- layer
- diffusion
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 8
- 229910052681 coesite Inorganic materials 0.000 abstract 4
- 229910052906 cristobalite Inorganic materials 0.000 abstract 4
- 238000009792 diffusion process Methods 0.000 abstract 4
- 239000010410 layer Substances 0.000 abstract 4
- 239000000377 silicon dioxide Substances 0.000 abstract 4
- 229910052682 stishovite Inorganic materials 0.000 abstract 4
- 229910052905 tridymite Inorganic materials 0.000 abstract 4
- 238000005530 etching Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 102000004129 N-Type Calcium Channels Human genes 0.000 abstract 1
- 108090000699 N-Type Calcium Channels Proteins 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 238000002347 injection Methods 0.000 abstract 1
- 239000007924 injection Substances 0.000 abstract 1
- 239000002344 surface layer Substances 0.000 abstract 1
Landscapes
- Element Separation (AREA)
- Bipolar Integrated Circuits (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10987777A JPS5443688A (en) | 1977-09-14 | 1977-09-14 | Production of semiconductor integrated circuit unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10987777A JPS5443688A (en) | 1977-09-14 | 1977-09-14 | Production of semiconductor integrated circuit unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5443688A true JPS5443688A (en) | 1979-04-06 |
| JPS6143858B2 JPS6143858B2 (enrdf_load_stackoverflow) | 1986-09-30 |
Family
ID=14521427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10987777A Granted JPS5443688A (en) | 1977-09-14 | 1977-09-14 | Production of semiconductor integrated circuit unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5443688A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55146960A (en) * | 1979-05-02 | 1980-11-15 | Hitachi Ltd | Manufacture of integrated circuit device |
| US4484388A (en) * | 1982-06-23 | 1984-11-27 | Tokyo Shibaura Denki Kabushiki Kaishi | Method for manufacturing semiconductor Bi-CMOS device |
| JPH03114235A (ja) * | 1989-05-22 | 1991-05-15 | Toshiba Corp | 電荷転送デバイスを含む半導体装置およびその製造方法 |
| US5156984A (en) * | 1987-12-31 | 1992-10-20 | Goldstar Co., Ltd. | Manufacturing method for a bi-cmos by trenching |
-
1977
- 1977-09-14 JP JP10987777A patent/JPS5443688A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55146960A (en) * | 1979-05-02 | 1980-11-15 | Hitachi Ltd | Manufacture of integrated circuit device |
| US4484388A (en) * | 1982-06-23 | 1984-11-27 | Tokyo Shibaura Denki Kabushiki Kaishi | Method for manufacturing semiconductor Bi-CMOS device |
| US5156984A (en) * | 1987-12-31 | 1992-10-20 | Goldstar Co., Ltd. | Manufacturing method for a bi-cmos by trenching |
| JPH03114235A (ja) * | 1989-05-22 | 1991-05-15 | Toshiba Corp | 電荷転送デバイスを含む半導体装置およびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6143858B2 (enrdf_load_stackoverflow) | 1986-09-30 |
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