JPS5443186A - Liquid phase epitaxial growth method - Google Patents
Liquid phase epitaxial growth methodInfo
- Publication number
- JPS5443186A JPS5443186A JP11014277A JP11014277A JPS5443186A JP S5443186 A JPS5443186 A JP S5443186A JP 11014277 A JP11014277 A JP 11014277A JP 11014277 A JP11014277 A JP 11014277A JP S5443186 A JPS5443186 A JP S5443186A
- Authority
- JP
- Japan
- Prior art keywords
- liq
- iiiwv
- crystal substrate
- epitaxial growth
- gas atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007791 liquid phase Substances 0.000 title 1
- 239000013078 crystal Substances 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 4
- 239000004065 semiconductor Substances 0.000 abstract 3
- RXJKFRMDXUJTEX-UHFFFAOYSA-N triethylphosphine Chemical compound CCP(CC)CC RXJKFRMDXUJTEX-UHFFFAOYSA-N 0.000 abstract 2
- YWWDBCBWQNCYNR-UHFFFAOYSA-N trimethylphosphine Chemical group CP(C)C YWWDBCBWQNCYNR-UHFFFAOYSA-N 0.000 abstract 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 229910052698 phosphorus Inorganic materials 0.000 abstract 1
- 239000011574 phosphorus Substances 0.000 abstract 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11014277A JPS5443186A (en) | 1977-09-13 | 1977-09-13 | Liquid phase epitaxial growth method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11014277A JPS5443186A (en) | 1977-09-13 | 1977-09-13 | Liquid phase epitaxial growth method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5443186A true JPS5443186A (en) | 1979-04-05 |
JPS5617320B2 JPS5617320B2 (en, 2012) | 1981-04-21 |
Family
ID=14528091
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11014277A Granted JPS5443186A (en) | 1977-09-13 | 1977-09-13 | Liquid phase epitaxial growth method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5443186A (en, 2012) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH023021U (en, 2012) * | 1988-06-18 | 1990-01-10 |
-
1977
- 1977-09-13 JP JP11014277A patent/JPS5443186A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5617320B2 (en, 2012) | 1981-04-21 |
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