JPS5441176A - Semiconductor strain measuring device - Google Patents

Semiconductor strain measuring device

Info

Publication number
JPS5441176A
JPS5441176A JP10743977A JP10743977A JPS5441176A JP S5441176 A JPS5441176 A JP S5441176A JP 10743977 A JP10743977 A JP 10743977A JP 10743977 A JP10743977 A JP 10743977A JP S5441176 A JPS5441176 A JP S5441176A
Authority
JP
Japan
Prior art keywords
measuring device
strain measuring
semiconductor strain
wirking
stabilizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10743977A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6135264B2 (OSRAM
Inventor
Yasumasa Matsuda
Masatoshi Tsuchiya
Hiroshi Soeno
Tomiro Yasuda
Kazuji Yamada
Satoshi Shimada
Motohisa Nishihara
Mitsuo Ai
Takeo Osada
Nagahiko Matsuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10743977A priority Critical patent/JPS5441176A/ja
Priority to US05/940,077 priority patent/US4166384A/en
Publication of JPS5441176A publication Critical patent/JPS5441176A/ja
Publication of JPS6135264B2 publication Critical patent/JPS6135264B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Heat Treatment Of Steel (AREA)
  • Measurement Of Force In General (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Pressure Sensors (AREA)
JP10743977A 1977-09-07 1977-09-07 Semiconductor strain measuring device Granted JPS5441176A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10743977A JPS5441176A (en) 1977-09-07 1977-09-07 Semiconductor strain measuring device
US05/940,077 US4166384A (en) 1977-09-07 1978-09-06 Semiconductor transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10743977A JPS5441176A (en) 1977-09-07 1977-09-07 Semiconductor strain measuring device

Publications (2)

Publication Number Publication Date
JPS5441176A true JPS5441176A (en) 1979-04-02
JPS6135264B2 JPS6135264B2 (OSRAM) 1986-08-12

Family

ID=14459167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10743977A Granted JPS5441176A (en) 1977-09-07 1977-09-07 Semiconductor strain measuring device

Country Status (2)

Country Link
US (1) US4166384A (OSRAM)
JP (1) JPS5441176A (OSRAM)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56124030A (en) * 1980-03-05 1981-09-29 Nippon Gakki Seizo Kk Manufacture of semiconductor pressure detector
JPS6348131U (OSRAM) * 1986-09-16 1988-04-01
JP2007315854A (ja) * 2006-05-24 2007-12-06 Chugoku Electric Power Co Inc:The 歪測定装置
JP2014196973A (ja) * 2013-03-29 2014-10-16 大和製衡株式会社 ヒステリシス誤差補償装置、荷重センサ、計量装置およびヒステリシス誤差補償方法
JP2020051829A (ja) * 2018-09-26 2020-04-02 ユニパルス株式会社 荷重変換器

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5723830A (en) * 1980-07-18 1982-02-08 Hitachi Ltd Post material for pressure transducer of semiconductor and its preparation
US4498231A (en) * 1982-02-26 1985-02-12 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Thin film strain transducer
US4425808A (en) 1982-02-26 1984-01-17 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Thin film strain transducer
CH655391B (OSRAM) * 1982-03-25 1986-04-15
US5088329A (en) * 1990-05-07 1992-02-18 Sahagen Armen N Piezoresistive pressure transducer
JPH05196458A (ja) * 1991-01-04 1993-08-06 Univ Leland Stanford Jr 原子力顕微鏡用ピエゾ抵抗性片持ばり構造体
DE4227764A1 (de) * 1992-08-24 1994-03-03 Schenck Ag Carl Sensor zum Erfassen mechanischer Belastungen
US5526112A (en) * 1993-03-05 1996-06-11 Sahagen; Armen N. Probe for monitoring a fluid medium
US5510895A (en) * 1993-03-05 1996-04-23 Sahagen; Armen N. Probe for monitoring a fluid medium
JP4390126B2 (ja) * 2002-06-17 2009-12-24 独立行政法人科学技術振興機構 ロボット指関節等に応用できる高感度トルクセンサ調整方法
US20060030062A1 (en) * 2004-08-05 2006-02-09 Jun He Micromachined wafer strain gauge

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3446064A (en) * 1966-12-19 1969-05-27 Whittaker Corp Stress sensor
US4019388A (en) * 1976-03-11 1977-04-26 Bailey Meter Company Glass to metal seal

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56124030A (en) * 1980-03-05 1981-09-29 Nippon Gakki Seizo Kk Manufacture of semiconductor pressure detector
JPS6348131U (OSRAM) * 1986-09-16 1988-04-01
JP2007315854A (ja) * 2006-05-24 2007-12-06 Chugoku Electric Power Co Inc:The 歪測定装置
JP2014196973A (ja) * 2013-03-29 2014-10-16 大和製衡株式会社 ヒステリシス誤差補償装置、荷重センサ、計量装置およびヒステリシス誤差補償方法
JP2020051829A (ja) * 2018-09-26 2020-04-02 ユニパルス株式会社 荷重変換器

Also Published As

Publication number Publication date
JPS6135264B2 (OSRAM) 1986-08-12
US4166384A (en) 1979-09-04

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