JPS5440580A - Wiring contact structure of semiconductor device - Google Patents

Wiring contact structure of semiconductor device

Info

Publication number
JPS5440580A
JPS5440580A JP10658877A JP10658877A JPS5440580A JP S5440580 A JPS5440580 A JP S5440580A JP 10658877 A JP10658877 A JP 10658877A JP 10658877 A JP10658877 A JP 10658877A JP S5440580 A JPS5440580 A JP S5440580A
Authority
JP
Japan
Prior art keywords
semiconductor device
contact structure
wiring contact
wiring
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10658877A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6140133B2 (en, 2012
Inventor
Makoto Takechi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10658877A priority Critical patent/JPS5440580A/ja
Publication of JPS5440580A publication Critical patent/JPS5440580A/ja
Publication of JPS6140133B2 publication Critical patent/JPS6140133B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP10658877A 1977-09-07 1977-09-07 Wiring contact structure of semiconductor device Granted JPS5440580A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10658877A JPS5440580A (en) 1977-09-07 1977-09-07 Wiring contact structure of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10658877A JPS5440580A (en) 1977-09-07 1977-09-07 Wiring contact structure of semiconductor device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP4912584A Division JPS59197153A (ja) 1984-03-16 1984-03-16 半導体装置の製法

Publications (2)

Publication Number Publication Date
JPS5440580A true JPS5440580A (en) 1979-03-30
JPS6140133B2 JPS6140133B2 (en, 2012) 1986-09-08

Family

ID=14437342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10658877A Granted JPS5440580A (en) 1977-09-07 1977-09-07 Wiring contact structure of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5440580A (en, 2012)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3131240A1 (de) * 1980-08-15 1982-06-09 Hitachi, Ltd., Tokyo Halbleitervorrichtungen und verfahren zu ihrer herstellung
JPH01218056A (ja) * 1988-02-26 1989-08-31 Toshiba Corp 半導体メモリの製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3999213A (en) * 1972-04-14 1976-12-21 U.S. Philips Corporation Semiconductor device and method of manufacturing the device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3999213A (en) * 1972-04-14 1976-12-21 U.S. Philips Corporation Semiconductor device and method of manufacturing the device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3131240A1 (de) * 1980-08-15 1982-06-09 Hitachi, Ltd., Tokyo Halbleitervorrichtungen und verfahren zu ihrer herstellung
US4792841A (en) * 1980-08-15 1988-12-20 Hitachi, Ltd. Semiconductor devices and a process for producing the same
US5028975A (en) * 1980-08-15 1991-07-02 Hitachi, Ltd. Semiconductor devices and a process for producing the same
JPH01218056A (ja) * 1988-02-26 1989-08-31 Toshiba Corp 半導体メモリの製造方法
US5187566A (en) * 1988-02-26 1993-02-16 Kabushiki Kaisha Toshiba Semiconductor memory and method of manufacturing the same

Also Published As

Publication number Publication date
JPS6140133B2 (en, 2012) 1986-09-08

Similar Documents

Publication Publication Date Title
JPS528785A (en) Semiconductor device electrode structure
JPS542679A (en) Nonvoltile semiconductor memory device
JPS5395571A (en) Semiconductor device
JPS53124087A (en) Manufacture of semiconductor device
JPS5440580A (en) Wiring contact structure of semiconductor device
JPS5321584A (en) Wiring system of semiconductor device
JPS53128285A (en) Semiconductor device and production of the same
JPS53120383A (en) Production of semiconductor device
JPS5276889A (en) Production of semiconductor device
JPS52128063A (en) Manufacture of semiconductor device
JPS5346288A (en) Mis type semiconductor device
JPS51121272A (en) Manufacturing method for semiconductor devices
JPS5339084A (en) Silicon gate mis semiconductor device
JPS53125778A (en) Semiconductor device
JPS5282083A (en) Production of semiconductor device
JPS5386177A (en) Production of semiconductor device
JPS52113162A (en) Preparation of semiconductor device
JPS53147487A (en) Semiconductor device
JPS53139474A (en) Manufacture of semiconductor device
JPS53139476A (en) Manufacture of semiconductor device
JPS53117985A (en) Semiconductor device
JPS5372567A (en) Semiconductor device
JPS53112071A (en) Semiconductor device
JPS51112266A (en) Semiconductor device production method
JPS5434784A (en) Semiconductor integrated circuit device