JPS53139474A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS53139474A JPS53139474A JP5454677A JP5454677A JPS53139474A JP S53139474 A JPS53139474 A JP S53139474A JP 5454677 A JP5454677 A JP 5454677A JP 5454677 A JP5454677 A JP 5454677A JP S53139474 A JPS53139474 A JP S53139474A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- drain
- matching
- self
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Local Oxidation Of Silicon (AREA)
Abstract
PURPOSE: To manufacture a device which occupies a small area and has a flat surface, by forming its source, drain and gate by means of self-matching and even a connection layer to the source and drain by means of self-matching.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5454677A JPS53139474A (en) | 1977-05-11 | 1977-05-11 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5454677A JPS53139474A (en) | 1977-05-11 | 1977-05-11 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53139474A true JPS53139474A (en) | 1978-12-05 |
Family
ID=12973669
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5454677A Pending JPS53139474A (en) | 1977-05-11 | 1977-05-11 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53139474A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5671976A (en) * | 1979-11-19 | 1981-06-15 | Seiko Epson Corp | Preparation method of mos type semiconductor system |
-
1977
- 1977-05-11 JP JP5454677A patent/JPS53139474A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5671976A (en) * | 1979-11-19 | 1981-06-15 | Seiko Epson Corp | Preparation method of mos type semiconductor system |
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