JPS53139474A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS53139474A
JPS53139474A JP5454677A JP5454677A JPS53139474A JP S53139474 A JPS53139474 A JP S53139474A JP 5454677 A JP5454677 A JP 5454677A JP 5454677 A JP5454677 A JP 5454677A JP S53139474 A JPS53139474 A JP S53139474A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
drain
matching
self
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5454677A
Other languages
Japanese (ja)
Inventor
Eisuke Ichinohe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5454677A priority Critical patent/JPS53139474A/en
Publication of JPS53139474A publication Critical patent/JPS53139474A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Local Oxidation Of Silicon (AREA)

Abstract

PURPOSE: To manufacture a device which occupies a small area and has a flat surface, by forming its source, drain and gate by means of self-matching and even a connection layer to the source and drain by means of self-matching.
COPYRIGHT: (C)1978,JPO&Japio
JP5454677A 1977-05-11 1977-05-11 Manufacture of semiconductor device Pending JPS53139474A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5454677A JPS53139474A (en) 1977-05-11 1977-05-11 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5454677A JPS53139474A (en) 1977-05-11 1977-05-11 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53139474A true JPS53139474A (en) 1978-12-05

Family

ID=12973669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5454677A Pending JPS53139474A (en) 1977-05-11 1977-05-11 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53139474A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5671976A (en) * 1979-11-19 1981-06-15 Seiko Epson Corp Preparation method of mos type semiconductor system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5671976A (en) * 1979-11-19 1981-06-15 Seiko Epson Corp Preparation method of mos type semiconductor system

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