JPS54159877A - Detection method for semiconductor substrate position and break - Google Patents
Detection method for semiconductor substrate position and breakInfo
- Publication number
- JPS54159877A JPS54159877A JP6936678A JP6936678A JPS54159877A JP S54159877 A JPS54159877 A JP S54159877A JP 6936678 A JP6936678 A JP 6936678A JP 6936678 A JP6936678 A JP 6936678A JP S54159877 A JPS54159877 A JP S54159877A
- Authority
- JP
- Japan
- Prior art keywords
- photo sensors
- break
- semiconductor substrate
- projected
- photo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To make a bonding state accurate by detecting the X and Y-direction position and the break of a semiconductor substrate by the light irradiation state to photo sensors, which are arranged adjacentaly on respective sides, and a break detecting photo sensor respectively.
CONSTITUTION: Oppositely to projection plate 8 where extended projections of square semiconductor substrates, which are stuck to light transmission sheet 1 having a thermal expansion property and are provided with a prescribed interval, are projected, a pair of photo sensors A and B and a pair of photo sensors C and D are arranged in respective outside parts of two sides, which are orthogonal to the X direction of a projected pattern when the extended projection is correctly projected, while contacting with the sides above. Photo sensor G is arranged in the outside part of each side orthogonal to the Y direction, and semiconductor substrate position conforming photo sensors L and M are arranged in the center of the projected pattern, and break detecting photo sensors H, I, J and K arranged at four corners of the projected pattern respectively.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6936678A JPS54159877A (en) | 1978-06-07 | 1978-06-07 | Detection method for semiconductor substrate position and break |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6936678A JPS54159877A (en) | 1978-06-07 | 1978-06-07 | Detection method for semiconductor substrate position and break |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54159877A true JPS54159877A (en) | 1979-12-18 |
JPS5746213B2 JPS5746213B2 (en) | 1982-10-01 |
Family
ID=13400478
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6936678A Granted JPS54159877A (en) | 1978-06-07 | 1978-06-07 | Detection method for semiconductor substrate position and break |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54159877A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5025578A (en) * | 1973-07-06 | 1975-03-18 | ||
JPS52138873A (en) * | 1976-05-14 | 1977-11-19 | Nec Corp | Automatic positioning method of semiconductor pellets |
-
1978
- 1978-06-07 JP JP6936678A patent/JPS54159877A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5025578A (en) * | 1973-07-06 | 1975-03-18 | ||
JPS52138873A (en) * | 1976-05-14 | 1977-11-19 | Nec Corp | Automatic positioning method of semiconductor pellets |
Also Published As
Publication number | Publication date |
---|---|
JPS5746213B2 (en) | 1982-10-01 |
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