JPS53148393A - Positioning method - Google Patents

Positioning method

Info

Publication number
JPS53148393A
JPS53148393A JP6365277A JP6365277A JPS53148393A JP S53148393 A JPS53148393 A JP S53148393A JP 6365277 A JP6365277 A JP 6365277A JP 6365277 A JP6365277 A JP 6365277A JP S53148393 A JPS53148393 A JP S53148393A
Authority
JP
Japan
Prior art keywords
center position
positioning method
shfit
symmetry
minimized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6365277A
Other languages
Japanese (ja)
Other versions
JPS5646256B2 (en
Inventor
Hiroshi Yasuda
Moritaka Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6365277A priority Critical patent/JPS53148393A/en
Publication of JPS53148393A publication Critical patent/JPS53148393A/en
Publication of JPS5646256B2 publication Critical patent/JPS5646256B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To enable to detect the center position with the shfit amount, by performing a pair of beam scannings in symmetry and with opposite direction relating to the expected center position of mark, and shifting one signal on the time axis so that the difference of the obtained signals is minimized.
COPYRIGHT: (C)1978,JPO&Japio
JP6365277A 1977-05-31 1977-05-31 Positioning method Granted JPS53148393A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6365277A JPS53148393A (en) 1977-05-31 1977-05-31 Positioning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6365277A JPS53148393A (en) 1977-05-31 1977-05-31 Positioning method

Publications (2)

Publication Number Publication Date
JPS53148393A true JPS53148393A (en) 1978-12-23
JPS5646256B2 JPS5646256B2 (en) 1981-10-31

Family

ID=13235486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6365277A Granted JPS53148393A (en) 1977-05-31 1977-05-31 Positioning method

Country Status (1)

Country Link
JP (1) JPS53148393A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57106130A (en) * 1980-12-24 1982-07-01 Jeol Ltd Detecting method for mark
JPS57119672U (en) * 1981-01-21 1982-07-24
JPS6010725A (en) * 1983-06-30 1985-01-19 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション System for arraying scanning beam in pattern
US4822170A (en) * 1986-04-30 1989-04-18 Commissariat A L'energie Atomique Sensor for the contactless linear measurement of the distance of a target by backscattered radiation

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57106130A (en) * 1980-12-24 1982-07-01 Jeol Ltd Detecting method for mark
JPS57119672U (en) * 1981-01-21 1982-07-24
JPS6010725A (en) * 1983-06-30 1985-01-19 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション System for arraying scanning beam in pattern
US4822170A (en) * 1986-04-30 1989-04-18 Commissariat A L'energie Atomique Sensor for the contactless linear measurement of the distance of a target by backscattered radiation

Also Published As

Publication number Publication date
JPS5646256B2 (en) 1981-10-31

Similar Documents

Publication Publication Date Title
JPS5385454A (en) Distance detecting method
JPS5385452A (en) Range finder
JPS53148393A (en) Positioning method
JPS51137443A (en) Method for measuring dimensions of three-dimensional structures
JPS5218170A (en) Position detection method
JPS53127266A (en) Forming method of marker
JPS5314238A (en) Electronic ignition system
JPS5353978A (en) Rotating position relation adjusting method
JPS5220859A (en) Direction signal generator
JPS52133733A (en) Scanning system
JPS5289795A (en) Nuclear fuel assembly
JPS53138024A (en) Position indicator
JPS53108772A (en) Production of semiconductor device
JPS5344081A (en) Analyzer using magnetic optical effect
JPS5290235A (en) Particular pattern extracting unit
JPS5263379A (en) Measurement of space filter speeds using coherent light
JPS52105736A (en) Area processor
JPS5383765A (en) Size measuring system
JPS51126190A (en) Optical measurement, calculation circuit
JPS53115212A (en) Magnetic head and production of the same
JPS542767A (en) Position relation measuring method
JPS52147474A (en) Laser speed meter
JPS5388757A (en) Flowrate measuring system
JPS5245959A (en) Method for measuring distance from moving body
JPS53127234A (en) Signal processing method of index color receiving tube