JPS53148393A - Positioning method - Google Patents

Positioning method

Info

Publication number
JPS53148393A
JPS53148393A JP6365277A JP6365277A JPS53148393A JP S53148393 A JPS53148393 A JP S53148393A JP 6365277 A JP6365277 A JP 6365277A JP 6365277 A JP6365277 A JP 6365277A JP S53148393 A JPS53148393 A JP S53148393A
Authority
JP
Japan
Prior art keywords
center
positioning
shfit
scannings
symmetry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6365277A
Other languages
Japanese (ja)
Other versions
JPS5646256B2 (en
Inventor
Hiroshi Yasuda
Moritaka Nakamura
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6365277A priority Critical patent/JPS5646256B2/ja
Publication of JPS53148393A publication Critical patent/JPS53148393A/en
Publication of JPS5646256B2 publication Critical patent/JPS5646256B2/ja
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To enable to detect the center position with the shfit amount, by performing a pair of beam scannings in symmetry and with opposite direction relating to the expected center position of mark, and shifting one signal on the time axis so that the difference of the obtained signals is minimized.
COPYRIGHT: (C)1978,JPO&Japio
JP6365277A 1977-05-31 1977-05-31 Expired JPS5646256B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6365277A JPS5646256B2 (en) 1977-05-31 1977-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6365277A JPS5646256B2 (en) 1977-05-31 1977-05-31

Publications (2)

Publication Number Publication Date
JPS53148393A true JPS53148393A (en) 1978-12-23
JPS5646256B2 JPS5646256B2 (en) 1981-10-31

Family

ID=13235486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6365277A Expired JPS5646256B2 (en) 1977-05-31 1977-05-31

Country Status (1)

Country Link
JP (1) JPS5646256B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57106130A (en) * 1980-12-24 1982-07-01 Jeol Ltd Detecting method for mark
JPS57119672U (en) * 1981-01-21 1982-07-24
JPS6010725A (en) * 1983-06-30 1985-01-19 Ibm System for arraying scanning beam in pattern
US4822170A (en) * 1986-04-30 1989-04-18 Commissariat A L'energie Atomique Sensor for the contactless linear measurement of the distance of a target by backscattered radiation

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57106130A (en) * 1980-12-24 1982-07-01 Jeol Ltd Detecting method for mark
JPS57119672U (en) * 1981-01-21 1982-07-24
JPS6010725A (en) * 1983-06-30 1985-01-19 Ibm System for arraying scanning beam in pattern
US4822170A (en) * 1986-04-30 1989-04-18 Commissariat A L'energie Atomique Sensor for the contactless linear measurement of the distance of a target by backscattered radiation

Also Published As

Publication number Publication date
JPS5646256B2 (en) 1981-10-31

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