JPS5383765A - Size measuring system - Google Patents

Size measuring system

Info

Publication number
JPS5383765A
JPS5383765A JP16028076A JP16028076A JPS5383765A JP S5383765 A JPS5383765 A JP S5383765A JP 16028076 A JP16028076 A JP 16028076A JP 16028076 A JP16028076 A JP 16028076A JP S5383765 A JPS5383765 A JP S5383765A
Authority
JP
Japan
Prior art keywords
measuring system
size measuring
pattern
vulctuations
estabilished
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16028076A
Other languages
Japanese (ja)
Inventor
Kenichi Kobayashi
Katsuo Takahashi
Masaharu Tadokoro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16028076A priority Critical patent/JPS5383765A/en
Publication of JPS5383765A publication Critical patent/JPS5383765A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To measure the actual size of a fine pattern by detecting the fluctuation of a focal point, which is estabilished by the vertical vulctuations of the end face of the pattern, with the use of a light receiver to correct the same by applying thereto two signal levels.
COPYRIGHT: (C)1978,JPO&Japio
JP16028076A 1976-12-29 1976-12-29 Size measuring system Pending JPS5383765A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16028076A JPS5383765A (en) 1976-12-29 1976-12-29 Size measuring system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16028076A JPS5383765A (en) 1976-12-29 1976-12-29 Size measuring system

Publications (1)

Publication Number Publication Date
JPS5383765A true JPS5383765A (en) 1978-07-24

Family

ID=15711568

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16028076A Pending JPS5383765A (en) 1976-12-29 1976-12-29 Size measuring system

Country Status (1)

Country Link
JP (1) JPS5383765A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5918404A (en) * 1982-07-21 1984-01-30 Matsushita Electric Ind Co Ltd Size measuring device
JPS6324113A (en) * 1986-03-19 1988-02-01 Toshiba Mach Co Ltd Measuring method for pattern

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4973158A (en) * 1972-11-13 1974-07-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4973158A (en) * 1972-11-13 1974-07-15

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5918404A (en) * 1982-07-21 1984-01-30 Matsushita Electric Ind Co Ltd Size measuring device
JPS6324113A (en) * 1986-03-19 1988-02-01 Toshiba Mach Co Ltd Measuring method for pattern

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