JPS5383765A - Size measuring system - Google Patents
Size measuring systemInfo
- Publication number
- JPS5383765A JPS5383765A JP16028076A JP16028076A JPS5383765A JP S5383765 A JPS5383765 A JP S5383765A JP 16028076 A JP16028076 A JP 16028076A JP 16028076 A JP16028076 A JP 16028076A JP S5383765 A JPS5383765 A JP S5383765A
- Authority
- JP
- Japan
- Prior art keywords
- measuring system
- size measuring
- pattern
- vulctuations
- estabilished
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To measure the actual size of a fine pattern by detecting the fluctuation of a focal point, which is estabilished by the vertical vulctuations of the end face of the pattern, with the use of a light receiver to correct the same by applying thereto two signal levels.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16028076A JPS5383765A (en) | 1976-12-29 | 1976-12-29 | Size measuring system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16028076A JPS5383765A (en) | 1976-12-29 | 1976-12-29 | Size measuring system |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5383765A true JPS5383765A (en) | 1978-07-24 |
Family
ID=15711568
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16028076A Pending JPS5383765A (en) | 1976-12-29 | 1976-12-29 | Size measuring system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5383765A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5918404A (en) * | 1982-07-21 | 1984-01-30 | Matsushita Electric Ind Co Ltd | Size measuring device |
JPS6324113A (en) * | 1986-03-19 | 1988-02-01 | Toshiba Mach Co Ltd | Measuring method for pattern |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4973158A (en) * | 1972-11-13 | 1974-07-15 |
-
1976
- 1976-12-29 JP JP16028076A patent/JPS5383765A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4973158A (en) * | 1972-11-13 | 1974-07-15 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5918404A (en) * | 1982-07-21 | 1984-01-30 | Matsushita Electric Ind Co Ltd | Size measuring device |
JPS6324113A (en) * | 1986-03-19 | 1988-02-01 | Toshiba Mach Co Ltd | Measuring method for pattern |
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