JPS54157096A - Production method of infrared ray detection element - Google Patents

Production method of infrared ray detection element

Info

Publication number
JPS54157096A
JPS54157096A JP6591978A JP6591978A JPS54157096A JP S54157096 A JPS54157096 A JP S54157096A JP 6591978 A JP6591978 A JP 6591978A JP 6591978 A JP6591978 A JP 6591978A JP S54157096 A JPS54157096 A JP S54157096A
Authority
JP
Japan
Prior art keywords
photo
photo detection
detection surface
improve
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6591978A
Other languages
Japanese (ja)
Other versions
JPS604597B2 (en
Inventor
Masaru Koseto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP53065919A priority Critical patent/JPS604597B2/en
Publication of JPS54157096A publication Critical patent/JPS54157096A/en
Publication of JPS604597B2 publication Critical patent/JPS604597B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Radiation Pyrometers (AREA)
  • Light Receiving Elements (AREA)

Abstract

PURPOSE: To prevent exfoliation, crack, etc., to improve the reliability of elements and improve a photo detection efficiency by forming an anodized film, where acetoamide is main components, on the photo detection surface of detection elements.
CONSTITUTION: After a multiple semiconductor substrate such as Hg1-XCdXTe 1 is processed and shaped as a detection element, a metal mask is used to form evaporation layer 5 of metal iridium on electrode forming parts A and B, and next, a photo resistor film is applied to the part except photo detection surface C. Then, the substrate is soaked in an anodized bath where N-methyl acetoamide is main components, and photo detection surface C is subjected to anodic oxidation. Consequently, anodized film 6 is formed on the photo detection surface of the Hg1- XCdXTe element, and after, the photo resistor film sticking to the part except the photo detection surface is removed to complete an infrared ray detection element. Therefore, the close adhesion prevented to improve the reliability of the elements, and the photo detection efficiency can be improved.
COPYRIGHT: (C)1979,JPO&Japio
JP53065919A 1978-05-31 1978-05-31 Manufacturing method of infrared sensing element Expired JPS604597B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53065919A JPS604597B2 (en) 1978-05-31 1978-05-31 Manufacturing method of infrared sensing element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53065919A JPS604597B2 (en) 1978-05-31 1978-05-31 Manufacturing method of infrared sensing element

Publications (2)

Publication Number Publication Date
JPS54157096A true JPS54157096A (en) 1979-12-11
JPS604597B2 JPS604597B2 (en) 1985-02-05

Family

ID=13300853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53065919A Expired JPS604597B2 (en) 1978-05-31 1978-05-31 Manufacturing method of infrared sensing element

Country Status (1)

Country Link
JP (1) JPS604597B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59104523A (en) * 1982-12-07 1984-06-16 Fujitsu Ltd Production of infrared-ray detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59104523A (en) * 1982-12-07 1984-06-16 Fujitsu Ltd Production of infrared-ray detector

Also Published As

Publication number Publication date
JPS604597B2 (en) 1985-02-05

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