JPS54157096A - Production method of infrared ray detection element - Google Patents
Production method of infrared ray detection elementInfo
- Publication number
- JPS54157096A JPS54157096A JP6591978A JP6591978A JPS54157096A JP S54157096 A JPS54157096 A JP S54157096A JP 6591978 A JP6591978 A JP 6591978A JP 6591978 A JP6591978 A JP 6591978A JP S54157096 A JPS54157096 A JP S54157096A
- Authority
- JP
- Japan
- Prior art keywords
- photo
- photo detection
- detection surface
- improve
- elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Radiation Pyrometers (AREA)
- Light Receiving Elements (AREA)
Abstract
PURPOSE: To prevent exfoliation, crack, etc., to improve the reliability of elements and improve a photo detection efficiency by forming an anodized film, where acetoamide is main components, on the photo detection surface of detection elements.
CONSTITUTION: After a multiple semiconductor substrate such as Hg1-XCdXTe 1 is processed and shaped as a detection element, a metal mask is used to form evaporation layer 5 of metal iridium on electrode forming parts A and B, and next, a photo resistor film is applied to the part except photo detection surface C. Then, the substrate is soaked in an anodized bath where N-methyl acetoamide is main components, and photo detection surface C is subjected to anodic oxidation. Consequently, anodized film 6 is formed on the photo detection surface of the Hg1- XCdXTe element, and after, the photo resistor film sticking to the part except the photo detection surface is removed to complete an infrared ray detection element. Therefore, the close adhesion prevented to improve the reliability of the elements, and the photo detection efficiency can be improved.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53065919A JPS604597B2 (en) | 1978-05-31 | 1978-05-31 | Manufacturing method of infrared sensing element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53065919A JPS604597B2 (en) | 1978-05-31 | 1978-05-31 | Manufacturing method of infrared sensing element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54157096A true JPS54157096A (en) | 1979-12-11 |
JPS604597B2 JPS604597B2 (en) | 1985-02-05 |
Family
ID=13300853
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53065919A Expired JPS604597B2 (en) | 1978-05-31 | 1978-05-31 | Manufacturing method of infrared sensing element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS604597B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59104523A (en) * | 1982-12-07 | 1984-06-16 | Fujitsu Ltd | Production of infrared-ray detector |
-
1978
- 1978-05-31 JP JP53065919A patent/JPS604597B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59104523A (en) * | 1982-12-07 | 1984-06-16 | Fujitsu Ltd | Production of infrared-ray detector |
Also Published As
Publication number | Publication date |
---|---|
JPS604597B2 (en) | 1985-02-05 |
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