JPS52119171A - Taper etching of metal film - Google Patents
Taper etching of metal filmInfo
- Publication number
- JPS52119171A JPS52119171A JP3571076A JP3571076A JPS52119171A JP S52119171 A JPS52119171 A JP S52119171A JP 3571076 A JP3571076 A JP 3571076A JP 3571076 A JP3571076 A JP 3571076A JP S52119171 A JPS52119171 A JP S52119171A
- Authority
- JP
- Japan
- Prior art keywords
- metal film
- taper etching
- fluoric acid
- taper
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent the shorting by forming the internal distibution of IC by the use of the fusible metal film to fluoric acid and by performing the heat processing with fluoric acid to smooth the step surface of the multi-layer distribution.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3571076A JPS52119171A (en) | 1976-03-31 | 1976-03-31 | Taper etching of metal film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3571076A JPS52119171A (en) | 1976-03-31 | 1976-03-31 | Taper etching of metal film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52119171A true JPS52119171A (en) | 1977-10-06 |
Family
ID=12449408
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3571076A Pending JPS52119171A (en) | 1976-03-31 | 1976-03-31 | Taper etching of metal film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52119171A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01125882A (en) * | 1987-08-21 | 1989-05-18 | Nippon Denso Co Ltd | Magnetism detector |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4924082A (en) * | 1972-06-26 | 1974-03-04 |
-
1976
- 1976-03-31 JP JP3571076A patent/JPS52119171A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4924082A (en) * | 1972-06-26 | 1974-03-04 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01125882A (en) * | 1987-08-21 | 1989-05-18 | Nippon Denso Co Ltd | Magnetism detector |
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