JPS52119171A - Taper etching of metal film - Google Patents

Taper etching of metal film

Info

Publication number
JPS52119171A
JPS52119171A JP3571076A JP3571076A JPS52119171A JP S52119171 A JPS52119171 A JP S52119171A JP 3571076 A JP3571076 A JP 3571076A JP 3571076 A JP3571076 A JP 3571076A JP S52119171 A JPS52119171 A JP S52119171A
Authority
JP
Japan
Prior art keywords
metal film
taper etching
fluoric acid
taper
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3571076A
Other languages
Japanese (ja)
Inventor
Hajime Matsui
Hiroaki Emoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3571076A priority Critical patent/JPS52119171A/en
Publication of JPS52119171A publication Critical patent/JPS52119171A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent the shorting by forming the internal distibution of IC by the use of the fusible metal film to fluoric acid and by performing the heat processing with fluoric acid to smooth the step surface of the multi-layer distribution.
COPYRIGHT: (C)1977,JPO&Japio
JP3571076A 1976-03-31 1976-03-31 Taper etching of metal film Pending JPS52119171A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3571076A JPS52119171A (en) 1976-03-31 1976-03-31 Taper etching of metal film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3571076A JPS52119171A (en) 1976-03-31 1976-03-31 Taper etching of metal film

Publications (1)

Publication Number Publication Date
JPS52119171A true JPS52119171A (en) 1977-10-06

Family

ID=12449408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3571076A Pending JPS52119171A (en) 1976-03-31 1976-03-31 Taper etching of metal film

Country Status (1)

Country Link
JP (1) JPS52119171A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01125882A (en) * 1987-08-21 1989-05-18 Nippon Denso Co Ltd Magnetism detector

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4924082A (en) * 1972-06-26 1974-03-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4924082A (en) * 1972-06-26 1974-03-04

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01125882A (en) * 1987-08-21 1989-05-18 Nippon Denso Co Ltd Magnetism detector

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