JPS54156455A - Surface acoustic wave element and its trimming method - Google Patents

Surface acoustic wave element and its trimming method

Info

Publication number
JPS54156455A
JPS54156455A JP6429378A JP6429378A JPS54156455A JP S54156455 A JPS54156455 A JP S54156455A JP 6429378 A JP6429378 A JP 6429378A JP 6429378 A JP6429378 A JP 6429378A JP S54156455 A JPS54156455 A JP S54156455A
Authority
JP
Japan
Prior art keywords
electrode
etching
acoustic wave
wave element
surface acoustic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6429378A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6141446B2 (enExample
Inventor
Yasuo Ehata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6429378A priority Critical patent/JPS54156455A/ja
Publication of JPS54156455A publication Critical patent/JPS54156455A/ja
Publication of JPS6141446B2 publication Critical patent/JPS6141446B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H03H3/10—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves for obtaining desired frequency or temperature coefficient

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP6429378A 1978-05-31 1978-05-31 Surface acoustic wave element and its trimming method Granted JPS54156455A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6429378A JPS54156455A (en) 1978-05-31 1978-05-31 Surface acoustic wave element and its trimming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6429378A JPS54156455A (en) 1978-05-31 1978-05-31 Surface acoustic wave element and its trimming method

Publications (2)

Publication Number Publication Date
JPS54156455A true JPS54156455A (en) 1979-12-10
JPS6141446B2 JPS6141446B2 (enExample) 1986-09-16

Family

ID=13254036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6429378A Granted JPS54156455A (en) 1978-05-31 1978-05-31 Surface acoustic wave element and its trimming method

Country Status (1)

Country Link
JP (1) JPS54156455A (enExample)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6120410A (ja) * 1984-07-07 1986-01-29 Nec Kansai Ltd 弾性表面波装置の製造方法
JPS63151103A (ja) * 1986-12-15 1988-06-23 Nippon Dempa Kogyo Co Ltd 圧電振動子の周波数調整方法および装置
JPS63140719U (enExample) * 1987-03-06 1988-09-16
JP2002043880A (ja) * 2000-07-26 2002-02-08 Murata Mfg Co Ltd 弾性表面波素子の周波数調整方法
JP2002290184A (ja) * 2001-03-28 2002-10-04 Seiko Epson Corp 弾性表面波装置及びその製造方法
JP2010233203A (ja) * 2009-02-27 2010-10-14 Seiko Epson Corp 弾性表面波共振子、および弾性表面波発振器
JP2011041287A (ja) * 2009-02-27 2011-02-24 Seiko Epson Corp 弾性表面波共振子、および弾性表面波発振器
US8063534B2 (en) 2008-02-20 2011-11-22 Seiko Epson Corporation Surface acoustic wave device and surface acoustic wave oscillator
WO2013081026A1 (ja) * 2011-12-01 2013-06-06 株式会社村田製作所 弾性表面波装置
US8471434B2 (en) 2010-08-26 2013-06-25 Seiko Epson Corporation Surface acoustic wave device, surface acoustic wave oscillator, and electronic apparatus
US8476984B2 (en) 2010-12-07 2013-07-02 Seiko Epson Corporation Vibration device, oscillator, and electronic apparatus
US8598766B2 (en) 2010-12-03 2013-12-03 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
US8692439B2 (en) 2010-08-26 2014-04-08 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic device
US8928432B2 (en) 2010-08-26 2015-01-06 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
US9048806B2 (en) 2010-09-09 2015-06-02 Seiko Epson Corporation Surface acoustic wave device, electronic apparatus, and sensor apparatus
US9088263B2 (en) 2010-06-17 2015-07-21 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4543565B2 (ja) * 2001-03-07 2010-09-15 株式会社村田製作所 弾性表面波素子の周波数調整方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53118338A (en) * 1977-03-25 1978-10-16 Nippon Telegr & Teleph Corp <Ntt> Active frequency adjustment method for elastic surface wave circuit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53118338A (en) * 1977-03-25 1978-10-16 Nippon Telegr & Teleph Corp <Ntt> Active frequency adjustment method for elastic surface wave circuit

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6120410A (ja) * 1984-07-07 1986-01-29 Nec Kansai Ltd 弾性表面波装置の製造方法
JPS63151103A (ja) * 1986-12-15 1988-06-23 Nippon Dempa Kogyo Co Ltd 圧電振動子の周波数調整方法および装置
JPS63140719U (enExample) * 1987-03-06 1988-09-16
JP2002043880A (ja) * 2000-07-26 2002-02-08 Murata Mfg Co Ltd 弾性表面波素子の周波数調整方法
JP2002290184A (ja) * 2001-03-28 2002-10-04 Seiko Epson Corp 弾性表面波装置及びその製造方法
US8063534B2 (en) 2008-02-20 2011-11-22 Seiko Epson Corporation Surface acoustic wave device and surface acoustic wave oscillator
US8084918B2 (en) 2008-02-20 2011-12-27 Seiko Epson Corporation Surface acoustic wave device and surface acoustic wave oscillator
US8237326B2 (en) 2008-02-20 2012-08-07 Seiko Epson Corporation Surface acoustic wave device and surface acoustic wave oscillator
JP2010233203A (ja) * 2009-02-27 2010-10-14 Seiko Epson Corp 弾性表面波共振子、および弾性表面波発振器
JP2011041287A (ja) * 2009-02-27 2011-02-24 Seiko Epson Corp 弾性表面波共振子、および弾性表面波発振器
US8305162B2 (en) 2009-02-27 2012-11-06 Seiko Epson Corporation Surface acoustic wave resonator and surface acoustic wave oscillator
US9762207B2 (en) 2009-02-27 2017-09-12 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic instrument
US8933612B2 (en) 2009-02-27 2015-01-13 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic instrument
US8502625B2 (en) 2009-02-27 2013-08-06 Seiko Epson Corporation Surface acoustic wave resonator and surface acoustic wave oscillator
US8952596B2 (en) 2009-02-27 2015-02-10 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic instrument
US9537464B2 (en) 2010-06-17 2017-01-03 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
US9088263B2 (en) 2010-06-17 2015-07-21 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
US8471434B2 (en) 2010-08-26 2013-06-25 Seiko Epson Corporation Surface acoustic wave device, surface acoustic wave oscillator, and electronic apparatus
US8928432B2 (en) 2010-08-26 2015-01-06 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
US8692439B2 (en) 2010-08-26 2014-04-08 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic device
US9048806B2 (en) 2010-09-09 2015-06-02 Seiko Epson Corporation Surface acoustic wave device, electronic apparatus, and sensor apparatus
US8791621B2 (en) 2010-12-03 2014-07-29 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
US8598766B2 (en) 2010-12-03 2013-12-03 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
US8476984B2 (en) 2010-12-07 2013-07-02 Seiko Epson Corporation Vibration device, oscillator, and electronic apparatus
JPWO2013081026A1 (ja) * 2011-12-01 2015-04-27 株式会社村田製作所 弾性表面波装置
WO2013081026A1 (ja) * 2011-12-01 2013-06-06 株式会社村田製作所 弾性表面波装置

Also Published As

Publication number Publication date
JPS6141446B2 (enExample) 1986-09-16

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