JPS54148482A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS54148482A JPS54148482A JP5779778A JP5779778A JPS54148482A JP S54148482 A JPS54148482 A JP S54148482A JP 5779778 A JP5779778 A JP 5779778A JP 5779778 A JP5779778 A JP 5779778A JP S54148482 A JPS54148482 A JP S54148482A
- Authority
- JP
- Japan
- Prior art keywords
- film
- coated
- torr
- hardening
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- 239000012212 insulator Substances 0.000 abstract 2
- 230000001681 protective effect Effects 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 229910003086 Ti–Pt Inorganic materials 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
- 229920001721 polyimide Polymers 0.000 abstract 1
- 239000011347 resin Substances 0.000 abstract 1
- 229920005989 resin Polymers 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5779778A JPS54148482A (en) | 1978-05-15 | 1978-05-15 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5779778A JPS54148482A (en) | 1978-05-15 | 1978-05-15 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54148482A true JPS54148482A (en) | 1979-11-20 |
| JPS6130733B2 JPS6130733B2 (enrdf_load_stackoverflow) | 1986-07-15 |
Family
ID=13065879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5779778A Granted JPS54148482A (en) | 1978-05-15 | 1978-05-15 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54148482A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62154646A (ja) * | 1985-12-26 | 1987-07-09 | Matsushita Electronics Corp | 半導体装置の製造方法 |
-
1978
- 1978-05-15 JP JP5779778A patent/JPS54148482A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62154646A (ja) * | 1985-12-26 | 1987-07-09 | Matsushita Electronics Corp | 半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6130733B2 (enrdf_load_stackoverflow) | 1986-07-15 |
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