JPS54139593A - Measuring method of auger electron spectral spectra - Google Patents

Measuring method of auger electron spectral spectra

Info

Publication number
JPS54139593A
JPS54139593A JP491078A JP491078A JPS54139593A JP S54139593 A JPS54139593 A JP S54139593A JP 491078 A JP491078 A JP 491078A JP 491078 A JP491078 A JP 491078A JP S54139593 A JPS54139593 A JP S54139593A
Authority
JP
Japan
Prior art keywords
modulated
sample
voltage
electrons
secondary electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP491078A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63735B2 (enrdf_load_stackoverflow
Inventor
Toshitaka Torikai
Masaki Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP491078A priority Critical patent/JPS54139593A/ja
Publication of JPS54139593A publication Critical patent/JPS54139593A/ja
Publication of JPS63735B2 publication Critical patent/JPS63735B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
JP491078A 1978-01-19 1978-01-19 Measuring method of auger electron spectral spectra Granted JPS54139593A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP491078A JPS54139593A (en) 1978-01-19 1978-01-19 Measuring method of auger electron spectral spectra

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP491078A JPS54139593A (en) 1978-01-19 1978-01-19 Measuring method of auger electron spectral spectra

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP60175368A Division JPS6150045A (ja) 1985-08-09 1985-08-09 オージエ電子分光スペクトル測定方法
JP62118680A Division JPS62294948A (ja) 1987-05-14 1987-05-14 オ−ジェ電子分光スペクトルの測定方法

Publications (2)

Publication Number Publication Date
JPS54139593A true JPS54139593A (en) 1979-10-30
JPS63735B2 JPS63735B2 (enrdf_load_stackoverflow) 1988-01-08

Family

ID=11596787

Family Applications (1)

Application Number Title Priority Date Filing Date
JP491078A Granted JPS54139593A (en) 1978-01-19 1978-01-19 Measuring method of auger electron spectral spectra

Country Status (1)

Country Link
JP (1) JPS54139593A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5923444A (ja) * 1982-07-30 1984-02-06 Hitachi Ltd 走査型反射電子回折顕微装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02256405A (ja) * 1989-03-29 1990-10-17 Copal Electron Co Ltd パワーチャック

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5923444A (ja) * 1982-07-30 1984-02-06 Hitachi Ltd 走査型反射電子回折顕微装置

Also Published As

Publication number Publication date
JPS63735B2 (enrdf_load_stackoverflow) 1988-01-08

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