JPS54134580A - Production of semiconductor integrated circuit device - Google Patents

Production of semiconductor integrated circuit device

Info

Publication number
JPS54134580A
JPS54134580A JP4245278A JP4245278A JPS54134580A JP S54134580 A JPS54134580 A JP S54134580A JP 4245278 A JP4245278 A JP 4245278A JP 4245278 A JP4245278 A JP 4245278A JP S54134580 A JPS54134580 A JP S54134580A
Authority
JP
Japan
Prior art keywords
layer
grown
film
insulating film
epi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4245278A
Other languages
English (en)
Inventor
Fumio Kawaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP4245278A priority Critical patent/JPS54134580A/ja
Publication of JPS54134580A publication Critical patent/JPS54134580A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP4245278A 1978-04-10 1978-04-10 Production of semiconductor integrated circuit device Pending JPS54134580A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4245278A JPS54134580A (en) 1978-04-10 1978-04-10 Production of semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4245278A JPS54134580A (en) 1978-04-10 1978-04-10 Production of semiconductor integrated circuit device

Publications (1)

Publication Number Publication Date
JPS54134580A true JPS54134580A (en) 1979-10-19

Family

ID=12636452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4245278A Pending JPS54134580A (en) 1978-04-10 1978-04-10 Production of semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS54134580A (ja)

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