JPS54128679A - Electron lens with deflector - Google Patents

Electron lens with deflector

Info

Publication number
JPS54128679A
JPS54128679A JP3642078A JP3642078A JPS54128679A JP S54128679 A JPS54128679 A JP S54128679A JP 3642078 A JP3642078 A JP 3642078A JP 3642078 A JP3642078 A JP 3642078A JP S54128679 A JPS54128679 A JP S54128679A
Authority
JP
Japan
Prior art keywords
objective lens
working distance
deflection coil
magnetic pole
deflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3642078A
Other languages
English (en)
Other versions
JPS6244382B2 (ja
Inventor
Shinjiro Katagiri
Teiji Katsuta
Giichi Igarashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3642078A priority Critical patent/JPS54128679A/ja
Publication of JPS54128679A publication Critical patent/JPS54128679A/ja
Publication of JPS6244382B2 publication Critical patent/JPS6244382B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP3642078A 1978-03-29 1978-03-29 Electron lens with deflector Granted JPS54128679A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3642078A JPS54128679A (en) 1978-03-29 1978-03-29 Electron lens with deflector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3642078A JPS54128679A (en) 1978-03-29 1978-03-29 Electron lens with deflector

Publications (2)

Publication Number Publication Date
JPS54128679A true JPS54128679A (en) 1979-10-05
JPS6244382B2 JPS6244382B2 (ja) 1987-09-19

Family

ID=12469327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3642078A Granted JPS54128679A (en) 1978-03-29 1978-03-29 Electron lens with deflector

Country Status (1)

Country Link
JP (1) JPS54128679A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08138602A (ja) * 1994-11-08 1996-05-31 Hitachi Ltd 電子線装置
US5629526A (en) * 1993-09-28 1997-05-13 Nikon Corporation Electro-magnetic lens, charged particle beam transferring apparatus, and method for manufacturing electro-magnetic lens
JP2005276819A (ja) * 2000-01-27 2005-10-06 Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh 帯電粒子ビームデバイスのための対物レンズ
JP2010049836A (ja) * 2008-08-19 2010-03-04 Jeol Ltd 電子ビーム装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02181292A (ja) * 1989-01-05 1990-07-16 Toshiba Corp 自動販売機

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4937251Y1 (ja) * 1970-05-13 1974-10-11
JPS5277573A (en) * 1975-12-24 1977-06-30 Hitachi Ltd Magnetic field generating device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5017713Y2 (ja) * 1972-07-03 1975-05-31

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4937251Y1 (ja) * 1970-05-13 1974-10-11
JPS5277573A (en) * 1975-12-24 1977-06-30 Hitachi Ltd Magnetic field generating device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5629526A (en) * 1993-09-28 1997-05-13 Nikon Corporation Electro-magnetic lens, charged particle beam transferring apparatus, and method for manufacturing electro-magnetic lens
JPH08138602A (ja) * 1994-11-08 1996-05-31 Hitachi Ltd 電子線装置
JP2005276819A (ja) * 2000-01-27 2005-10-06 Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh 帯電粒子ビームデバイスのための対物レンズ
JP2010049836A (ja) * 2008-08-19 2010-03-04 Jeol Ltd 電子ビーム装置

Also Published As

Publication number Publication date
JPS6244382B2 (ja) 1987-09-19

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