JPS54128679A - Electron lens with deflector - Google Patents
Electron lens with deflectorInfo
- Publication number
- JPS54128679A JPS54128679A JP3642078A JP3642078A JPS54128679A JP S54128679 A JPS54128679 A JP S54128679A JP 3642078 A JP3642078 A JP 3642078A JP 3642078 A JP3642078 A JP 3642078A JP S54128679 A JPS54128679 A JP S54128679A
- Authority
- JP
- Japan
- Prior art keywords
- objective lens
- working distance
- deflection coil
- magnetic pole
- deflector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 abstract 7
- 230000005294 ferromagnetic effect Effects 0.000 abstract 2
- 239000000126 substance Substances 0.000 abstract 2
- 230000000694 effects Effects 0.000 abstract 1
- 125000006850 spacer group Chemical group 0.000 abstract 1
- 229910000859 α-Fe Inorganic materials 0.000 abstract 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3642078A JPS54128679A (en) | 1978-03-29 | 1978-03-29 | Electron lens with deflector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3642078A JPS54128679A (en) | 1978-03-29 | 1978-03-29 | Electron lens with deflector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54128679A true JPS54128679A (en) | 1979-10-05 |
JPS6244382B2 JPS6244382B2 (ja) | 1987-09-19 |
Family
ID=12469327
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3642078A Granted JPS54128679A (en) | 1978-03-29 | 1978-03-29 | Electron lens with deflector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54128679A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08138602A (ja) * | 1994-11-08 | 1996-05-31 | Hitachi Ltd | 電子線装置 |
US5629526A (en) * | 1993-09-28 | 1997-05-13 | Nikon Corporation | Electro-magnetic lens, charged particle beam transferring apparatus, and method for manufacturing electro-magnetic lens |
JP2005276819A (ja) * | 2000-01-27 | 2005-10-06 | Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh | 帯電粒子ビームデバイスのための対物レンズ |
JP2010049836A (ja) * | 2008-08-19 | 2010-03-04 | Jeol Ltd | 電子ビーム装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02181292A (ja) * | 1989-01-05 | 1990-07-16 | Toshiba Corp | 自動販売機 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4937251Y1 (ja) * | 1970-05-13 | 1974-10-11 | ||
JPS5277573A (en) * | 1975-12-24 | 1977-06-30 | Hitachi Ltd | Magnetic field generating device |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5017713Y2 (ja) * | 1972-07-03 | 1975-05-31 |
-
1978
- 1978-03-29 JP JP3642078A patent/JPS54128679A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4937251Y1 (ja) * | 1970-05-13 | 1974-10-11 | ||
JPS5277573A (en) * | 1975-12-24 | 1977-06-30 | Hitachi Ltd | Magnetic field generating device |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5629526A (en) * | 1993-09-28 | 1997-05-13 | Nikon Corporation | Electro-magnetic lens, charged particle beam transferring apparatus, and method for manufacturing electro-magnetic lens |
JPH08138602A (ja) * | 1994-11-08 | 1996-05-31 | Hitachi Ltd | 電子線装置 |
JP2005276819A (ja) * | 2000-01-27 | 2005-10-06 | Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh | 帯電粒子ビームデバイスのための対物レンズ |
JP2010049836A (ja) * | 2008-08-19 | 2010-03-04 | Jeol Ltd | 電子ビーム装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6244382B2 (ja) | 1987-09-19 |
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