JPS5457860A - Electric field radiation type electron gun - Google Patents

Electric field radiation type electron gun

Info

Publication number
JPS5457860A
JPS5457860A JP12347177A JP12347177A JPS5457860A JP S5457860 A JPS5457860 A JP S5457860A JP 12347177 A JP12347177 A JP 12347177A JP 12347177 A JP12347177 A JP 12347177A JP S5457860 A JPS5457860 A JP S5457860A
Authority
JP
Japan
Prior art keywords
anode
lens
field
electron gun
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12347177A
Other languages
Japanese (ja)
Other versions
JPS6057181B2 (en
Inventor
Sumitaka Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12347177A priority Critical patent/JPS6057181B2/en
Publication of JPS5457860A publication Critical patent/JPS5457860A/en
Publication of JPS6057181B2 publication Critical patent/JPS6057181B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To realize the minimun diameter of an electron beam in the region which has a large current and a low acceleration voltage by provideing the anode of a field radiation type electron gun into the pole hole of a magnetic electron lens.
CONSTITUTION: The 1st anode 2 and 2nd anode 3 are electrically insulated each other and assembled on the same axis to form a Butler-type electrostatic lens. To the outside of the 2nd anode, magnetic field electron lens 4 is provided coaxially through the wall of vacuum container 5 in the center middle between the upper and lower poles of magnetic field electron lens 4, the 2nd anode 3 is positioned; and then, the field is overlaid on the electrostatic field of a Butler-type lens
COPYRIGHT: (C)1979,JPO&Japio
JP12347177A 1977-10-17 1977-10-17 field emission electron gun Expired JPS6057181B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12347177A JPS6057181B2 (en) 1977-10-17 1977-10-17 field emission electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12347177A JPS6057181B2 (en) 1977-10-17 1977-10-17 field emission electron gun

Publications (2)

Publication Number Publication Date
JPS5457860A true JPS5457860A (en) 1979-05-10
JPS6057181B2 JPS6057181B2 (en) 1985-12-13

Family

ID=14861439

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12347177A Expired JPS6057181B2 (en) 1977-10-17 1977-10-17 field emission electron gun

Country Status (1)

Country Link
JP (1) JPS6057181B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0214212Y2 (en) * 1985-08-16 1990-04-18
JPS6240878U (en) * 1985-08-29 1987-03-11

Also Published As

Publication number Publication date
JPS6057181B2 (en) 1985-12-13

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