JPS54125143A - Treating device using hydrogen fluoride-containing gas - Google Patents

Treating device using hydrogen fluoride-containing gas

Info

Publication number
JPS54125143A
JPS54125143A JP3286478A JP3286478A JPS54125143A JP S54125143 A JPS54125143 A JP S54125143A JP 3286478 A JP3286478 A JP 3286478A JP 3286478 A JP3286478 A JP 3286478A JP S54125143 A JPS54125143 A JP S54125143A
Authority
JP
Japan
Prior art keywords
gas
cooled
container
hydrogen fluoride
etched
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3286478A
Other languages
English (en)
Other versions
JPS558592B2 (ja
Inventor
Masahiro Shibagaki
Yasuhiro Horiike
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3286478A priority Critical patent/JPS54125143A/ja
Publication of JPS54125143A publication Critical patent/JPS54125143A/ja
Publication of JPS558592B2 publication Critical patent/JPS558592B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP3286478A 1978-03-24 1978-03-24 Treating device using hydrogen fluoride-containing gas Granted JPS54125143A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3286478A JPS54125143A (en) 1978-03-24 1978-03-24 Treating device using hydrogen fluoride-containing gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3286478A JPS54125143A (en) 1978-03-24 1978-03-24 Treating device using hydrogen fluoride-containing gas

Publications (2)

Publication Number Publication Date
JPS54125143A true JPS54125143A (en) 1979-09-28
JPS558592B2 JPS558592B2 (ja) 1980-03-05

Family

ID=12370709

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3286478A Granted JPS54125143A (en) 1978-03-24 1978-03-24 Treating device using hydrogen fluoride-containing gas

Country Status (1)

Country Link
JP (1) JPS54125143A (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6067673A (ja) * 1983-09-22 1985-04-18 Semiconductor Energy Lab Co Ltd プラズマ気相反応方法
JPH03107479A (ja) * 1989-09-22 1991-05-07 Nec Corp ドライエッチング装置
JPH07169756A (ja) * 1994-11-07 1995-07-04 Semiconductor Energy Lab Co Ltd プラズマエッチング方法
JPH08306675A (ja) * 1996-05-13 1996-11-22 Semiconductor Energy Lab Co Ltd プラズマエッチング方法
CN103981522A (zh) * 2014-04-17 2014-08-13 宁波鱼化龙机电科技有限公司 一种陶瓷插芯钢线蚀刻机
KR101874821B1 (ko) * 2016-04-05 2018-07-06 주식회사 테스 저온 공정을 이용한 실리콘산화막의 선택적 식각 방법

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57100558U (ja) * 1980-12-12 1982-06-21

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6067673A (ja) * 1983-09-22 1985-04-18 Semiconductor Energy Lab Co Ltd プラズマ気相反応方法
JPH0344148B2 (ja) * 1983-09-22 1991-07-05 Handotai Energy Kenkyusho
JPH03107479A (ja) * 1989-09-22 1991-05-07 Nec Corp ドライエッチング装置
JPH07169756A (ja) * 1994-11-07 1995-07-04 Semiconductor Energy Lab Co Ltd プラズマエッチング方法
JPH08306675A (ja) * 1996-05-13 1996-11-22 Semiconductor Energy Lab Co Ltd プラズマエッチング方法
CN103981522A (zh) * 2014-04-17 2014-08-13 宁波鱼化龙机电科技有限公司 一种陶瓷插芯钢线蚀刻机
KR101874821B1 (ko) * 2016-04-05 2018-07-06 주식회사 테스 저온 공정을 이용한 실리콘산화막의 선택적 식각 방법

Also Published As

Publication number Publication date
JPS558592B2 (ja) 1980-03-05

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