JPS54121683A - Semiconductor device and its manufacture - Google Patents
Semiconductor device and its manufactureInfo
- Publication number
- JPS54121683A JPS54121683A JP2867778A JP2867778A JPS54121683A JP S54121683 A JPS54121683 A JP S54121683A JP 2867778 A JP2867778 A JP 2867778A JP 2867778 A JP2867778 A JP 2867778A JP S54121683 A JPS54121683 A JP S54121683A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- film
- wiring
- substrate
- selectively
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2867778A JPS54121683A (en) | 1978-03-15 | 1978-03-15 | Semiconductor device and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2867778A JPS54121683A (en) | 1978-03-15 | 1978-03-15 | Semiconductor device and its manufacture |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13903984A Division JPS6063966A (ja) | 1984-07-06 | 1984-07-06 | 半導体装置の製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54121683A true JPS54121683A (en) | 1979-09-20 |
Family
ID=12255120
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2867778A Pending JPS54121683A (en) | 1978-03-15 | 1978-03-15 | Semiconductor device and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54121683A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56142672A (en) * | 1980-04-07 | 1981-11-07 | Seiko Epson Corp | Semiconductor device and manufacture thereof |
JPS5768049A (en) * | 1980-10-15 | 1982-04-26 | Fujitsu Ltd | Semiconductor device and manufacture thereof |
JPS57180142A (en) * | 1981-04-28 | 1982-11-06 | Toshiba Corp | Manufacture of semiconductor device |
JPS5928356A (ja) * | 1982-08-09 | 1984-02-15 | Nec Corp | 半導体装置の製造方法 |
-
1978
- 1978-03-15 JP JP2867778A patent/JPS54121683A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56142672A (en) * | 1980-04-07 | 1981-11-07 | Seiko Epson Corp | Semiconductor device and manufacture thereof |
JPS5768049A (en) * | 1980-10-15 | 1982-04-26 | Fujitsu Ltd | Semiconductor device and manufacture thereof |
JPS57180142A (en) * | 1981-04-28 | 1982-11-06 | Toshiba Corp | Manufacture of semiconductor device |
JPS5928356A (ja) * | 1982-08-09 | 1984-02-15 | Nec Corp | 半導体装置の製造方法 |
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