JPS54117690A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS54117690A JPS54117690A JP2480278A JP2480278A JPS54117690A JP S54117690 A JPS54117690 A JP S54117690A JP 2480278 A JP2480278 A JP 2480278A JP 2480278 A JP2480278 A JP 2480278A JP S54117690 A JPS54117690 A JP S54117690A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- film
- type
- sio
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 6
- 229910052681 coesite Inorganic materials 0.000 abstract 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract 3
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- 229910052682 stishovite Inorganic materials 0.000 abstract 3
- 229910052905 tridymite Inorganic materials 0.000 abstract 3
- 238000009792 diffusion process Methods 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 229960002050 hydrofluoric acid Drugs 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910021426 porous silicon Inorganic materials 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2480278A JPS54117690A (en) | 1978-03-03 | 1978-03-03 | Production of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2480278A JPS54117690A (en) | 1978-03-03 | 1978-03-03 | Production of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54117690A true JPS54117690A (en) | 1979-09-12 |
| JPS6125226B2 JPS6125226B2 (enrdf_load_stackoverflow) | 1986-06-14 |
Family
ID=12148317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2480278A Granted JPS54117690A (en) | 1978-03-03 | 1978-03-03 | Production of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54117690A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56157058A (en) * | 1980-04-14 | 1981-12-04 | Thomson Csf | Semiconductor device and method of manufacturing same |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63190905A (ja) * | 1987-01-31 | 1988-08-08 | Hiroshi Sato | 並列駆動油圧モ−タ装置および油圧モ−タ駆動車両 |
| JPS63172725U (enrdf_load_stackoverflow) * | 1987-04-30 | 1988-11-09 |
-
1978
- 1978-03-03 JP JP2480278A patent/JPS54117690A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56157058A (en) * | 1980-04-14 | 1981-12-04 | Thomson Csf | Semiconductor device and method of manufacturing same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6125226B2 (enrdf_load_stackoverflow) | 1986-06-14 |
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