JPS54107875A - Producing apparatus for activated gas - Google Patents

Producing apparatus for activated gas

Info

Publication number
JPS54107875A
JPS54107875A JP1489678A JP1489678A JPS54107875A JP S54107875 A JPS54107875 A JP S54107875A JP 1489678 A JP1489678 A JP 1489678A JP 1489678 A JP1489678 A JP 1489678A JP S54107875 A JPS54107875 A JP S54107875A
Authority
JP
Japan
Prior art keywords
activated
vessel
gas
treated
reaction gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1489678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6222652B2 (enrdf_load_stackoverflow
Inventor
Tsuneo Muranaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1489678A priority Critical patent/JPS54107875A/ja
Publication of JPS54107875A publication Critical patent/JPS54107875A/ja
Publication of JPS6222652B2 publication Critical patent/JPS6222652B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
JP1489678A 1978-02-14 1978-02-14 Producing apparatus for activated gas Granted JPS54107875A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1489678A JPS54107875A (en) 1978-02-14 1978-02-14 Producing apparatus for activated gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1489678A JPS54107875A (en) 1978-02-14 1978-02-14 Producing apparatus for activated gas

Publications (2)

Publication Number Publication Date
JPS54107875A true JPS54107875A (en) 1979-08-24
JPS6222652B2 JPS6222652B2 (enrdf_load_stackoverflow) 1987-05-19

Family

ID=11873748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1489678A Granted JPS54107875A (en) 1978-02-14 1978-02-14 Producing apparatus for activated gas

Country Status (1)

Country Link
JP (1) JPS54107875A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63140513U (enrdf_load_stackoverflow) * 1987-03-06 1988-09-16

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49111873A (enrdf_load_stackoverflow) * 1973-02-28 1974-10-24
JPS5171597A (enrdf_load_stackoverflow) * 1974-12-18 1976-06-21 Hitachi Ltd
JPS52135878A (en) * 1976-05-10 1977-11-14 Agency Of Ind Science & Technol Plasma reaction apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49111873A (enrdf_load_stackoverflow) * 1973-02-28 1974-10-24
JPS5171597A (enrdf_load_stackoverflow) * 1974-12-18 1976-06-21 Hitachi Ltd
JPS52135878A (en) * 1976-05-10 1977-11-14 Agency Of Ind Science & Technol Plasma reaction apparatus

Also Published As

Publication number Publication date
JPS6222652B2 (enrdf_load_stackoverflow) 1987-05-19

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Legal Events

Date Code Title Description
A313 Final decision of rejection without a dissenting response from the applicant

Effective date: 20040406

Free format text: JAPANESE INTERMEDIATE CODE: A313

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20040427