JPS5171597A - - Google Patents

Info

Publication number
JPS5171597A
JPS5171597A JP49144521A JP14452174A JPS5171597A JP S5171597 A JPS5171597 A JP S5171597A JP 49144521 A JP49144521 A JP 49144521A JP 14452174 A JP14452174 A JP 14452174A JP S5171597 A JPS5171597 A JP S5171597A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49144521A
Other languages
Japanese (ja)
Other versions
JPS5344795B2 (enrdf_load_stackoverflow
Inventor
Kunyuki Sakumichi
Katsumi Tokikuchi
Ichiro Kamata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14452174A priority Critical patent/JPS5344795B2/ja
Publication of JPS5171597A publication Critical patent/JPS5171597A/ja
Publication of JPS5344795B2 publication Critical patent/JPS5344795B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP14452174A 1974-12-18 1974-12-18 Expired JPS5344795B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14452174A JPS5344795B2 (enrdf_load_stackoverflow) 1974-12-18 1974-12-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14452174A JPS5344795B2 (enrdf_load_stackoverflow) 1974-12-18 1974-12-18

Publications (2)

Publication Number Publication Date
JPS5171597A true JPS5171597A (enrdf_load_stackoverflow) 1976-06-21
JPS5344795B2 JPS5344795B2 (enrdf_load_stackoverflow) 1978-12-01

Family

ID=15364262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14452174A Expired JPS5344795B2 (enrdf_load_stackoverflow) 1974-12-18 1974-12-18

Country Status (1)

Country Link
JP (1) JPS5344795B2 (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5376758A (en) * 1976-12-20 1978-07-07 Nippon Telegr & Teleph Corp <Ntt> Plasma etching method
JPS54107875A (en) * 1978-02-14 1979-08-24 Toshiba Corp Producing apparatus for activated gas
JPS5553422A (en) * 1978-10-16 1980-04-18 Mitsubishi Electric Corp Plasma reactor
JPS56147438A (en) * 1980-04-16 1981-11-16 Fujitsu Ltd Microplasma treatment apparatus
JPS56155535A (en) * 1980-05-02 1981-12-01 Nippon Telegr & Teleph Corp <Ntt> Film forming device utilizing plasma

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5376758A (en) * 1976-12-20 1978-07-07 Nippon Telegr & Teleph Corp <Ntt> Plasma etching method
JPS54107875A (en) * 1978-02-14 1979-08-24 Toshiba Corp Producing apparatus for activated gas
JPS5553422A (en) * 1978-10-16 1980-04-18 Mitsubishi Electric Corp Plasma reactor
JPS56147438A (en) * 1980-04-16 1981-11-16 Fujitsu Ltd Microplasma treatment apparatus
JPS56155535A (en) * 1980-05-02 1981-12-01 Nippon Telegr & Teleph Corp <Ntt> Film forming device utilizing plasma

Also Published As

Publication number Publication date
JPS5344795B2 (enrdf_load_stackoverflow) 1978-12-01

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