JPS54107875A - Producing apparatus for activated gas - Google Patents
Producing apparatus for activated gasInfo
- Publication number
- JPS54107875A JPS54107875A JP1489678A JP1489678A JPS54107875A JP S54107875 A JPS54107875 A JP S54107875A JP 1489678 A JP1489678 A JP 1489678A JP 1489678 A JP1489678 A JP 1489678A JP S54107875 A JPS54107875 A JP S54107875A
- Authority
- JP
- Japan
- Prior art keywords
- activated
- vessel
- gas
- treated
- reaction gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
PURPOSE:To enable to obtain a large quantity of activated gas without using expensive quartz material, by placing the material to be treated in vacuum vessel and introducing reaction gas in the vessel and also, activating by the microwave electric power from the microwave oscillator and moreover, subjecting the above activated gas to the material to be treated. CONSTITUTION:The vacuum vessel 111 is made vacuous at less than 10<-1> torr. by the exhaust apparatus 116, after the material to be treated 113 is placed on the stand 114. Next, the reaction gas to be activated 110 is sent in the vessel 111 and the electricity supply waveguide 107 and the vessel 111, are made vacuous at 10- 10<-1> torr. regulating the flow regulating valve 109. Then, microwave electric power is generated by operating the microwave oscillator 101 and is transmitted to the tube 107 through the isolator 102, the power monitor 103, the impedance matching box 104 and the corner 105 and the reaction gas in the tube 107 is activated. Activated gas is sucked in the direction of the apparatus 116 and is subjected to the material 113 and then, desired treatment is carried out.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1489678A JPS54107875A (en) | 1978-02-14 | 1978-02-14 | Producing apparatus for activated gas |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1489678A JPS54107875A (en) | 1978-02-14 | 1978-02-14 | Producing apparatus for activated gas |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54107875A true JPS54107875A (en) | 1979-08-24 |
JPS6222652B2 JPS6222652B2 (en) | 1987-05-19 |
Family
ID=11873748
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1489678A Granted JPS54107875A (en) | 1978-02-14 | 1978-02-14 | Producing apparatus for activated gas |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54107875A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63140513U (en) * | 1987-03-06 | 1988-09-16 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49111873A (en) * | 1973-02-28 | 1974-10-24 | ||
JPS5171597A (en) * | 1974-12-18 | 1976-06-21 | Hitachi Ltd | IONKAKOSOCHI |
JPS52135878A (en) * | 1976-05-10 | 1977-11-14 | Agency Of Ind Science & Technol | Plasma reaction apparatus |
-
1978
- 1978-02-14 JP JP1489678A patent/JPS54107875A/en active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49111873A (en) * | 1973-02-28 | 1974-10-24 | ||
JPS5171597A (en) * | 1974-12-18 | 1976-06-21 | Hitachi Ltd | IONKAKOSOCHI |
JPS52135878A (en) * | 1976-05-10 | 1977-11-14 | Agency Of Ind Science & Technol | Plasma reaction apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS6222652B2 (en) | 1987-05-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A313 | Final decision of rejection without a dissenting response from the applicant |
Effective date: 20040406 Free format text: JAPANESE INTERMEDIATE CODE: A313 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20040427 |