JPS49111873A - - Google Patents

Info

Publication number
JPS49111873A
JPS49111873A JP2312673A JP2312673A JPS49111873A JP S49111873 A JPS49111873 A JP S49111873A JP 2312673 A JP2312673 A JP 2312673A JP 2312673 A JP2312673 A JP 2312673A JP S49111873 A JPS49111873 A JP S49111873A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2312673A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2312673A priority Critical patent/JPS49111873A/ja
Publication of JPS49111873A publication Critical patent/JPS49111873A/ja
Pending legal-status Critical Current

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  • Physical Or Chemical Processes And Apparatus (AREA)
JP2312673A 1973-02-28 1973-02-28 Pending JPS49111873A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2312673A JPS49111873A (enrdf_load_stackoverflow) 1973-02-28 1973-02-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2312673A JPS49111873A (enrdf_load_stackoverflow) 1973-02-28 1973-02-28

Publications (1)

Publication Number Publication Date
JPS49111873A true JPS49111873A (enrdf_load_stackoverflow) 1974-10-24

Family

ID=12101809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2312673A Pending JPS49111873A (enrdf_load_stackoverflow) 1973-02-28 1973-02-28

Country Status (1)

Country Link
JP (1) JPS49111873A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54107875A (en) * 1978-02-14 1979-08-24 Toshiba Corp Producing apparatus for activated gas
JPH03288539A (ja) * 1990-04-04 1991-12-18 Nippon Koshuha Kk 合成高周波プラズマ反応装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3275412A (en) * 1965-02-04 1966-09-27 American Cyanamid Co Production of oxides by plasma process

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3275412A (en) * 1965-02-04 1966-09-27 American Cyanamid Co Production of oxides by plasma process

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54107875A (en) * 1978-02-14 1979-08-24 Toshiba Corp Producing apparatus for activated gas
JPH03288539A (ja) * 1990-04-04 1991-12-18 Nippon Koshuha Kk 合成高周波プラズマ反応装置

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